NDLI: Spectroscopic ellipsometry and atomic force microscopy studies of RF sputtered Cd/sub 1-x/Mn/sub x/Te films

Content Provider	IEEE Xplore Digital Library
Author	Shanli Wang Jian Li Jie Chen Collins, R.W. Compaan, A.D.
Copyright Year	2005
Description	Author affiliation: Dept. of Phys. & Astron., Toledo Univ., OH, USA (Shanli Wang; Jian Li; Jie Chen; Collins, R.W.; Compaan, A.D.)
Abstract	Automatic spectroscopic ellipsometry (SE) with a 0.75 - 6.5 eV photon energy range was used together with atomic force microscopy to investigate surface optical and structural characteristics of as-deposited, annealed, and chloride treated Cd/sub 1-x/Mn/sub x/Te thin films. The E/sub 1/, E/sub 1/ + /spl Delta//sub 1/, and E/sub 2/ critical-point structures were clearly observed in the SE data for as-deposited samples. The variation of the pseudodielectric function for as-deposited samples was observed under different surface preparation and measurement conditions by in situ SE. The AFM images of the corresponding as-deposited samples revealed variations in surface morphology that were consistent with the SE results. For chloride treated samples, the pseudodielectric function was much different from that of as-deposited samples. This difference was due not only to oxidation of the surface, but also to a disruptive change of the bulk film under such annealing conditions.
Sponsorship	IEEE Electron Devices Soc. (USA)
Starting Page	480
Ending Page	483
File Size	778080
Page Count	4
File Format	PDF
ISBN	0780387074
ISSN	01608371
DOI	10.1109/PVSC.2005.1488174
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-01-03
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Atomic force microscopy Spectroscopy Ellipsometry Radio frequency Surface morphology Surface treatment Atom optics Optical microscopy Optical films Annealing
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Electrical and Electronic Engineering

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