NDLI: Optical properties of PECVD and UVCVD SiN/sub x/:H antireflection coatings for silicon solar cells

Content Provider	IEEE Xplore Digital Library
Author	Lelievre, J.-F. Kaminski, A. Boyeaux, J.-P. Monna, R. Lemiti, M.
Copyright Year	2005
Description	Author affiliation: Laboratoire de Physique de la Matiere, Inst. Nat. des Sci. Appliquees de Lyon, Villeurbanne, France (Lelievre, J.-F.; Kaminski, A.; Boyeaux, J.-P.)
Abstract	A complete study of the optical properties has been achieved for hydrogenated silicon nitride SiN/sub x/:H obtained by either low frequency (40 kHz) plasma enhanced chemical vapour deposition (LF-PECVD) or by another low temperature deposition technique: ultraviolet photo-assisted CVD (UVCVD). spectroscopic ellipsometry measurements were carried out on a large number of samples. The results were gathered in a data library in order to compute the wavelength-dependant reflection, absorption and transmission coefficients through the layers. Different optical behaviors were observed according to the deposition technique, with stronger absorption and hence smaller optical gaps for UVCVD films. This is believed to be due to the formation in the SiN/sub x/ matrix of amorphous silicon (a-Si) clusters, which seem to be much bigger than those obtained in PECVD layers.
Sponsorship	IEEE Electron Devices Soc. (USA)
Starting Page	1111
Ending Page	1114
File Size	713254
Page Count	4
File Format	PDF
ISBN	0780387074
ISSN	01608371
DOI	10.1109/PVSC.2005.1488330
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-01-03
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon compounds Optical films Plasma properties Plasma measurements Plasma temperature Chemical vapor deposition Electromagnetic wave absorption Frequency Plasma chemistry Plasma waves
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Electrical and Electronic Engineering

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