NDLI: Modelling of CMUTs with anisotropic plates

Content Provider	IEEE Xplore Digital Library
Author	la Cour, M.F. Christiansen, T.L. Jensen, J.A. Thomsen, E.V.
Copyright Year	2012
Description	Author affiliation: Dept. of Electr. Eng., Tech. Univ. of Denmark, Lyngby, Denmark (la Cour, M.F.; Jensen, J.A.) \|\| Dept. of Micro & Nanotechnol., Tech. Univ. of Denmark, Lyngby, Denmark (Christiansen, T.L.; Thomsen, E.V.)
Abstract	Traditionally, CMUTs are modelled using the isotropic plate equation and this leads to deviations between analytical calculations and FEM simulations. In this paper, the deflection profile and material parameters are calculated using the anisotropic plate equation. It is shown that the anisotropic calculations match perfectly with FEM while an isotropic approach causes up to 10% deviations in deflection profile. Furthermore, we show how commonly used analytic modelling methods such as static calculations of the pull-in voltage and dynamic modelling through an equivalent circuit representation can be adjusted to include the correct anisotropic behaviour by using an effective flexural rigidity. The anisotropic calculations are also compared to experimental data from actual CMUTs showing an error of maximum 3%.
Starting Page	588
Ending Page	591
File Size	632563
Page Count	4
File Format	PDF
ISBN	9781467345613
ISSN	19485719
e-ISBN	9781467345620
DOI	10.1109/ULTSYM.2012.0146
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-10-07
Publisher Place	Germany
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Mathematical model Equations Analytical models Silicon Integrated circuit modeling Resonant frequency Finite element analysis
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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