NDLI: An analytical analysis of the sensitivity of circular piezoelectric micromachined ultrasonic transducers to residual stress

Content Provider	IEEE Xplore Digital Library
Author	Sammoura, F. Smyth, K. Bathurst, S. Sang-Gook Kim
Copyright Year	2012
Description	Author affiliation: Mech. Eng. Dept., Massachusetts Inst. of Technol., Cambridge, MA, USA (Smyth, K.; Bathurst, S.; Sang-Gook Kim) \|\| Microsyst. Div., Masdar Inst. of Sci. & Technol., Abu Dhabi, United Arab Emirates (Sammoura, F.)
Abstract	In this work, a novel Green's function technique is used to solve for plate deflection of a piezoelectric micromachined ultrasonic transducer (pMUT) under the influence of residual stress. The pMUT is modelled as a clamped, circular diaphragm consisting of a stack of structural and piezoelectric material actuated by an arbitrary number of circular electrodes. From classic plate theory, the equation of motion for axisymmetric bending is derived based on residual stress considering external pressure, voltage applied across the piezoelectric material, and electrode geometry. With Green's function, the equation of motion is analytically solved where the plate impedance shows a considerable increase in bandwidth and center deflection for a plate under compressive stress. The static zero-bias deflection of a microfabricated pMUT with a center electrode covering ≈60% of the plate radius agrees well with the model prediction. Based on the model and confirmed by experiment, it is suggested that an outer dummy electrode extending to the plate edge should be added to the pMUT design to prevent zero-bias deflection.
Starting Page	580
Ending Page	583
File Size	1537665
Page Count	4
File Format	PDF
ISBN	9781467345613
ISSN	19485719
e-ISBN	9781467345620
DOI	10.1109/ULTSYM.2012.0144
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-10-07
Publisher Place	Germany
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrodes Residual stresses Mathematical model Acoustics Equations Vibrations Ultrasonic transducers circular plate deflection piezoelectric micromachined ultrasonic trasducer PMUT residual stress bandwidth Green's function
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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