NDLI: Investigation on a Novel Dual-Grating Macro-Micro Driven High Speed Precision Positioning System for NEMS

Content Provider	IEEE Xplore Digital Library
Author	Sun, L.N. Jie, D.G. Liu, Y.J. Chen, Z.C. Cai, H.G.
Copyright Year	2006
Description	Author affiliation: Robotics Inst., Harbin Inst. of Technol. (Sun, L.N.; Jie, D.G.; Liu, Y.J.; Chen, Z.C.; Cai, H.G.)
Abstract	Microelectromechanical system (MEMS) is naturally continuing its downsizing into nanoelectromechanical system (NEMS), but at the same time it is indispensable in the package equipment used for nano-devices packaging in NEMS manufacture. A novel dual-grating macro-micro driven high speed precision XY-stage positioning system is presented in this paper. Combining macro with micro actuator, a system of large workspace and high speed with high resolution of motion is developed. Two linear voice coil motors (VCM) are used into the macro motion, and two piezoelectric (PZT) driven micro stages of high frequency are mounted on each motor to compensate the position error. A novel elastic decoupling mechanism is used in the stage to avoid the moving gap. The coarse micron grating and the fine nanometer grating are integrated into the closed-loop feedback, which is used to measure the position of the output end of macro stage and micro stage. Adopting a complex method of the position of coarse/fine gratings, the nano-positioning with high speed of XY-stage is achieved. By using the mechanical dynamic simulation and finite element analysis (FEA) method, the decoupling mechanism and the micro mechanism are optimized, and the dynamic characteristics of the stage are investigated, which is based on the rigid-flexible dynamic analysis of mechanical system. The simulation results show that this new configuration allows a workspace of 25mmtimes25mm and an acceleration exceeding $100m/s^{2}$ with a resolution of motion better than 10nm
Starting Page	644
Ending Page	648
File Size	5153205
Page Count	5
File Format	PDF
ISBN	1424401399
DOI	10.1109/NEMS.2006.334864
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-01-18
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Nanoelectromechanical systems Gratings Packaging machines Micromotors Microelectromechanical systems Micromechanical devices Manufacturing Microactuators Coils Frequency XY-stage dual-grating high speed high accuracy macro-micro driven
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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