NDLI: A New-Style Compositive Miniature Spectrum Instrument

Content Provider	IEEE Xplore Digital Library
Author	Jianguo Wang Zhiyu Wen Gang Chen
Copyright Year	2006
Description	Author affiliation: Sch. of Optoelectron. Eng., Chongqing Univ. (Jianguo Wang; Zhiyu Wen; Gang Chen)
Abstract	This paper advances a kind of micro spectrometer, which is based upon Fabry-Perot antrum's character of filtering the waves. The basic structure of the micro spectrometer is the array of Fabry-Perot antrum which contains many different length of antrum on the substrate of silicon, consequently we can achieve the detector for several wavelengths simultaneously. The unit of probing is a Fabry-Perot antrum, which is made up of the substrate of silicon-metal film-silicon dioxide layer-metal film. We carried out the corresponding simulation. In the basic structure of aluminum film (14 nm)silicon dioxide layer-silver film (39 nm), the resolution can reach 15 nm. When the area of a unit of probing is 0.14 mm times 0.14 mm only, it can reach the luminous flux of miniature grating spectrum instrument (the minimum volume in the order of cm), but the volume of the part of spectrum detector is only the order of mm. The design size of the micro spectrometer is in a few millimeters. Furthermore it has no movable parts and could detect several wavelengths at the same time. It is possible to fabricate such micro spectrometer through existing process methods of IC technology
Starting Page	1499
Ending Page	1503
File Size	4258929
Page Count	5
File Format	PDF
ISBN	1424401399
DOI	10.1109/NEMS.2006.334816
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-01-18
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Instruments Spectroscopy Fabry-Perot Substrates Detectors Filtering Sensor arrays Silicon Semiconductor films Aluminum IC technology compositive miniature spectrum instrument Fabry-Perot antrum
Content Type	Text
Resource Type	Article

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