NDLI: A novel out-of-plane MEMS tunneling accelerometer with excellent low frequency resolution

Content Provider	IEEE Xplore Digital Library
Author	Haifeng Dong Yilong Hao Sanmin Shen Lin He Jungang Lei
Copyright Year	2006
Description	Author affiliation: Nat. Key Lab. of Transducer Technol., Chinese Acad. of Sci., Beijing (Haifeng Dong)
Abstract	After successful fabrication and characterization of the first ICP based tunneling accelerometer, we modified the fabrication process to eliminate the knife-blades on the beam, which is caused by the double mask ICP process. These changes have resulted in about 20% yields enhancement at the open-loop characterization phase. The new process also enhances the height of the proof mass without increasing the aspect ratio. During the characterization, output saturation is observed which is caused by the variation of the tunneling voltage with the tunneling current. It deteriorates the resolution of the accelerometer at the same time. A new feedback circuit is designed in which the tunneling voltage is kept constant. The accelerometer is tested in the low noise environment and the result shows excellent low frequency resolution, which is 15 mug/rtHz (from 1 Hz to 100 Hz). Different tip areas are fabricated in this experiments and the open loop characterization shows no obvious relation between the happening of the tunneling current, the barrier height and the tip area.
Starting Page	821
Ending Page	825
File Size	4430805
Page Count	5
File Format	PDF
ISBN	1424401399
DOI	10.1109/NEMS.2006.334904
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-01-18
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Tunneling Accelerometers Frequency Fabrication Voltage Feedback circuits Circuit testing Circuit noise Working environment noise ICP MEMS tunneling accelerometer
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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