NDLI: Design of a Hybrid Micro/Nano Cantilever-based Resonant Sensor and its Fabrication Method

Content Provider	IEEE Xplore Digital Library
Author	Rong Zhu Dingqu Wang Zhaoying Zhou Xiongying Ye
Copyright Year	2006
Description	Author affiliation: Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing (Rong Zhu; Dingqu Wang; Zhaoying Zhou; Xiongying Ye)
Abstract	Due to novel mechanical and electrical properties of nanomaterials, such as carbon nanotubes and semiconducting oxide nanobelts, utilizing nanomaterials in micro electromechanical structure to improve performances of sensors has attracted many interests. In this paper, we report a novel micro/nano cantilever structure applying to sense accelerations based on resonant detection. The structure is comprised of a seismic micromachined inertial mass supported by two parallel ZnO nanobelts as doubly-clamped nano-cantilevers suspending between two metal electrodes located over a micromachined trench. Another bottom electrode located underneath the mass is utilized to apply electrostatic force on the mass. The acceleration normal to the mass plane induces electrostatic stiffness change and, in turn, a change in the resonant frequency. We propose design and an effective fabrication for this sensor structure.
Starting Page	766
Ending Page	769
File Size	4897351
Page Count	4
File Format	PDF
ISBN	1424401399
DOI	10.1109/NEMS.2006.334891
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-01-18
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Resonance Fabrication Electromechanical sensors Mechanical sensors Nanomaterials Acceleration Electrodes Electrostatics Mechanical factors Carbon nanotubes acceleration sensor nanoelectromechanical systems(NEMS) resonant Sensor
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in