NDLI: Improved Calibration Method for Lateral Force of the Cantilever Deflection Force Sensor in Atomic Force Microscope

Content Provider	IEEE Xplore Digital Library
Author	Fei Wang Xuezeng Zhao
Copyright Year	2006
Description	Author affiliation: Sch. of Mech. & Electron. Eng., Harbin Inst. of Technol. (Fei Wang; Xuezeng Zhao)
Abstract	Quantitative friction measurement of nano materials in atomic force microscope (AFM) requires accurate calibration method for the lateral force. An improved calibration method for the lateral force of the cantilever in AFM is presented. The calibration factor derived from the original method increased with the applied normal load, which indicates that separate calibration should be required for every given applied normal load to keep the accuracy of friction measurement. We analyze the reason for this phenomenon, and improve the original method by introducing the contact factor, which is derived from the contact stiffness between the tip and the sample, to the calculation of calibration factors. Our method makes the calculation of calibration factors under different applied normal loads be possible without repeating the calibration procedure. Comparative experiments on a silicon wafer have been done by both the two methods to validate our method
Starting Page	34
Ending Page	37
File Size	4209046
Page Count	4
File Format	PDF
ISBN	1424401399
DOI	10.1109/NEMS.2006.334616
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-01-18
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Force sensors Atomic force microscopy Calibration Friction Force measurement Atomic measurements Torque measurement Systems engineering and theory Electron microscopy Error correction atomic force microscope calibration cantilever
Content Type	Text
Resource Type	Article

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