NDLI: Feasibility Study of Micro Electro-thermal Actuator for Lever Nano Motion

Content Provider	IEEE Xplore Digital Library
Author	Xuejin Shen Yongyu Zhang Xiaoyang Chen
Copyright Year	2006
Description	Author affiliation: Dept. of Mech. Autom., Shanghai Univ., Shanghai (Xuejin Shen; Yongyu Zhang; Xiaoyang Chen)
Abstract	The nano manipulation needs miniaturized microtools for minute adjustment or in situ mechanical characterization. This paper demonstrates the feasibility of using bulk silicon electro-thermal expansion micro actuator to drive a lever nano motion platform. The feasibility study includes specimen preparation and dynamic and static characteristic testing. The specimen is made up of a micro electro-thermal actuator and two stage lever with 24.6 lever ratio for transforming the micro displacement of thermal expansion actuator into nano displacement of platform, and the dimension of whole specimen is 1150 mumx 850 mum. The other symmetry two stage lever is used to amplify the nano displacement of platform upon the micro displacement simultaneously for comparing with that one of thermal expansion actuator. The lever fulcrum is flexure hinge. In the testing, the apply voltage ranging from 0 to 5 V. The biggest static input displacement of thermal expansion actuator is more than 2 mum, and the output displacement is about half of the input ones. The non-synchronizing phenomenon has been found in the dynamic process, which is depending on the frequency of applied alternating voltage.
Starting Page	1025
Ending Page	1028
File Size	3958797
Page Count	4
File Format	PDF
ISBN	1424401399
DOI	10.1109/NEMS.2006.334604
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-01-18
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Actuators Thermal expansion Thermal force Silicon Fasteners Micromechanical devices Nanobioscience Automation Microactuators Testing right circular flexure hinge MEMS nano motion lever electro-thermal actuator
Content Type	Text
Resource Type	Article

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