NDLI: Double Matched Microgyro Resonant System in Drive and Sense Modes

Content Provider	IEEE Xplore Digital Library
Author	Dunzhu Xia Bailing Zhou Shourong Wang
Copyright Year	2006
Description	Author affiliation: Dept. of Instrum. Sci. & Eng., Southeast Univ., Nanjing (Dunzhu Xia; Bailing Zhou; Shourong Wang)
Abstract	The working principle of Micromechanical Resonator is introduced by using control theory. The Q of the MEMS resonator is very important under different vacuum condition. Theoretically, the sense mode motion is amplified by the mechanical quality factor of the sense mode when the two frequencies are closely matched. To achieve a high stability driving not only at the aspect of resonance frequency but also at its amplitude. An intelligent Double Matched Resonance system based on DSP chip and DDS combined techniques is presented and a design frame for a new type intelligent closed-loop drive generator is proposed. The interface method in digital circuitry part and the weak signal detection technique in analogy circuitry part are analyzed in detail. Combined with closed-loop experiment data and scanning curves, several frequency searching approaches in different vacuum circumstance are presented. After automatic sweeping to their resonance frequency, a number of MEMS z-axis rate gyroscope can work in excellent stability.
Starting Page	919
Ending Page	922
File Size	3703711
Page Count	4
File Format	PDF
ISBN	1424401399
DOI	10.1109/NEMS.2006.334565
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-01-18
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Resonance Micromechanical devices Circuit stability Resonant frequency Control theory Q factor Digital signal processing chips Signal detection Circuit analysis Signal analysis MEMS Double Matched Microgyro
Content Type	Text
Resource Type	Article

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