NDLI: Measurement System for MEMS Dynamics Characterization with Environmental Control Facility

Content Provider	IEEE Xplore Digital Library
Author	Yongjun Xie Shiyuan Liu Tielin Shi Haishan Wang Wendong Zhang
Copyright Year	2006
Description	Author affiliation: Sch. of Mech. Sci. & Eng., Huazhong Univ. of Sci. & Technol. (Yongjun Xie; Shiyuan Liu; Tielin Shi; Haishan Wang)
Abstract	Testing of microstructure dynamics is necessary to develop reliable and marketable microelectromechanical systems (MEMS) products. A measurement system for three-dimensional motions and dynamics characterization of MEMS is presented in this paper. The system integrates phase shifting interferometry, microvision, stroboscopic illumination, and base excitation, thus is able to measure the surface shapes and deformations as well as the in-plane and out-of-plane motions of microstructures. Moreover, it includes an environmental control facility, which can generate variable pressure and/or temperature for MEMS testing. A novel hybrid block matching algorithm is also proposed to extract the in-plane displacement from vision images with a sub-pixel resolution. The experimental work conducted on several typical MEMS devices such as microresonator arrays, AFM cantilevers, pressure sensor membranes and printed circuit boards confirms that such a measurement system is effective and efficient to characterize MEMS dynamics with a nanometer resolution
Starting Page	1055
Ending Page	1059
File Size	5789071
Page Count	5
File Format	PDF
ISBN	1424401399
DOI	10.1109/NEMS.2006.334611
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-01-18
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Control systems Sensor arrays Microstructure Shape measurement System testing Microelectromechanical systems Phase shifting interferometry Lighting Phase measurement base excitation MEMS dynamics characterization interferometry microvision stroboscopic illumination
Content Type	Text
Resource Type	Article

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