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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Ezaki, T. Yamazaki, T. Yasuda, S. Yagi, T. |
| Copyright Year | 2006 |
| Description | Author affiliation: NEMS Platform Res. Div., Canon Inc., Atsugi (Ezaki, T.; Yamazaki, T.; Yasuda, S.; Yagi, T.) |
| Abstract | In this paper we present a novel sample injection chip. Microvalves and microchannels are integrated on the chip. The valve is a passive lowpass valve that allows a liquid flow at a low flow rate and prohibits it when the flow rate exceeds a threshold. We can control the injection volume by changing the channel design. The chip consists of a channel substrate, an upper valve substrate and an under valve substrate. These substrates are separately fabricated and bonded by using MEMS techniques. The chip, not to leak at a pressure difference of 5.0 MPa, was successfully applied to high performance liquid chromatography (HPLC). A specific volume of sample (100 nl) was injected to the HPLC column. The results show that the sample injection chip has the possibility of being used in the micro-HPLC systems. |
| Starting Page | 979 |
| Ending Page | 983 |
| File Size | 4753042 |
| Page Count | 5 |
| File Format | |
| ISBN | 1424401399 |
| DOI | 10.1109/NEMS.2006.334578 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2006-01-18 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Valves Microvalves Fluid flow Bonding Systems engineering and theory Yagi-Uda antennas Nanoelectromechanical systems Microchannel Micromechanical devices Chemicals HPLC sample injection microvalve passive valve low pass valve |
| Content Type | Text |
| Resource Type | Article |
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