NDLI: Design and simulation of a macro-micro dual-drive high acceleration precision XY-stage for IC bonding technology

Content Provider	IEEE Xplore Digital Library
Author	Degang Jie Lining Sun Yanjie Liu Yuhong Zhu Hegao Cai
Copyright Year	2005
Description	Author affiliation: Robotics Inst., Harbin Inst. of Technol., China (Degang Jie; Lining Sun; Yanjie Liu; Yuhong Zhu; Hegao Cai)
Abstract	A macro-micro dual-drive high acceleration precision XY-stage is presented in this paper. Combining macro with micro actuator, a system of large workspace and high acceleration with high resolution of motion is developed. Two linear voice coil motors (VCM) are used into the macro motion, and two PZT-driven micro stages of high frequency are mounted on each motor to compensate the position error. A novel elastic decoupling mechanism is used in the stage to avoid the moving gap. The high resolution linear encoder is integrated into the closed-loop feedback, which is used to measure the position of the output end of macro stage and micro stage. By using the mechanical dynamic simulation and FEA method, the decoupling mechanism and the micro mechanism are optimized, and the dynamic characteristics of the high acceleration stage are investigated, which is based on the rigid-flexible dynamic analysis of mechanical system. The simulation results show that this new configuration allows a workspace of 25/spl times/25mm/sup 2/ and an acceleration exceeding 100m/s/sup 2/ with a resolution of motion better than 10nm. The significantly improved performance of the XY-stage can meet the requirement of the rapid development of IC bonding technology.
Starting Page	161
Ending Page	165
File Size	629905
Page Count	5
File Format	PDF
ISBN	0780394496
DOI	10.1109/ICEPT.2005.1564689
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-08-30
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Acceleration Bonding Micromotors Microactuators Coils Frequency Output feedback Position measurement Analytical models Optimization methods
Content Type	Text
Resource Type	Article

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