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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Peters, C. Ergeneman, O. Sotiriou, G.A. Pratsinis, S.E. Nelson, B.J. Hierold, C. |
| Copyright Year | 2013 |
| Description | Author affiliation: Particle Technol. Lab., ETH Zurich, Zurich, Switzerland (Sotiriou, G.A.; Pratsinis, S.E.) || Micro & Nanosyst., ETH Zurich, Zurich, Switzerland (Peters, C.; Hierold, C.) || Inst. of Robot. & Intell. Syst., ETH Zurich, Zurich, Switzerland (Ergeneman, O.; Nelson, B.J.) |
| Abstract | We present a facile method to extend the particle-induced exposure depth limitation in SU-8-based superparamagnetic polymer composites (SPMPCs) by adding H-Nu 470 photo initiator (PI). While superparamagnetic magnetite particles strongly absorb i-line radiation required to crosslink SU-8, H-Nu 470 expands the photosensitivity of the resist towards the visible spectrum, where the composite is more transparent. Using the g-line emission of a mercury short-arc lamp we are able to increase the exposure depth from 5.3 μm to 11.6 μm for a 5 %vol composite and for the first time expose a 10 %vol composite with a depth (thickness) of 5.6 μm. In comparison to i-line sensitive SPMPCs, the proposed PI enables crosslinking films with a 2.2-fold magnetization while maintaining a homogeneous particle distribution. |
| Starting Page | 2676 |
| Ending Page | 2679 |
| File Size | 489953 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781467359832 |
| ISSN | 21641641 |
| DOI | 10.1109/Transducers.2013.6627357 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2013-06-16 |
| Publisher Place | Spain |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Absorption Polymers Films Nanoparticles Saturation magnetization Resists Magnetization photocuring Superparamagnetic composite visible light curing H-Nu 470 SU-8 magnetite nanoparticles |
| Content Type | Text |
| Resource Type | Article |
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