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Content Provider | IEEE Xplore Digital Library |
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Author | Yanghee Kim Lee, H.J. Dohee Kim Yun Kyung Kim Soo Hyun Lee Eui-Sung Yoon Il-Joo Cho |
Copyright Year | 2013 |
Description | Author affiliation: Center for Neuro-Med., Korea Inst. of Sci. & Technol., Seoul, South Korea (Dohee Kim; Yun Kyung Kim) || Center for BioMicrosystems, Korea Inst. of Sci. & Technol., Jeonju, South Korea (Yanghee Kim; Lee, H.J.; Soo Hyun Lee; Eui-Sung Yoon; Il-Joo Cho) |
Abstract | We present a multi-functional silicon neural probe that consists of a microfluidic channel for selective delivery of a precise quantity of a chemical and multiple recording electrodes to simultaneously monitor the effects of drug delivery. A 30-μm wide, 10-μm high microfluidic channel is embedded in the probe substrate by anodic bonding, thermal reflowing and polishing a glass wafer to seal the channel. 10-μm-by-10-μm four multiple recording sites are located near the outlet port to record neural spike signals in response to the delivered drug. The fabricated 150-μm-thick probe exhibits a flow rate of 0.2 μl/min at the input air pressure of 200 kPa and an average impedance value of 3.0 MΩ at 1 kHz. In addition, the functionality of this probe is demonstrated through an in vivo experiment where neural spike signals at the hippocampus of an anesthetized mouse are successfully detected and recorded. |
Starting Page | 876 |
Ending Page | 879 |
File Size | 1168667 |
Page Count | 4 |
File Format | |
ISBN | 9781467359832 |
ISSN | 21641641 |
DOI | 10.1109/Transducers.2013.6626907 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2013-06-16 |
Publisher Place | Spain |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Probes Microfluidics Glass Drug delivery Silicon Electrodes Chemicals integrated silicon MEMS probe Neural probe drug delivery chemical stimulation |
Content Type | Text |
Resource Type | Article |
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