NDLI: A facile, standardized fabrication approach and scalable architecture for a micro gas chromatography system with integrated pump

Content Provider	IEEE Xplore Digital Library
Author	Qin, Y. Gianchandani, Y.B.
Copyright Year	2013
Description	Author affiliation: Center for Wireless Integrated MicroSensing & Syst. (WIMS), Univ. of Michigan, Ann Arbor, MI, USA (Qin, Y.; Gianchandani, Y.B.)
Abstract	This paper reports a micro gas chromatography (μGC) system that includes a microfabricated Knudsen pump, preconcentrator, separation column, and discharge-based detector. All four components are co-designed and co-fabricated on the same glass wafer by a 3-mask lithographic process, and fit within a footprint of 1.8 × 1.8 $mm^{2}.$ Each component is tested individually: the motionless Knudsen pump provides 0.4 sccm air flow rate with 1 W input power; the preconcentrator demonstrates a fully desorbed heptane peak at 170°C; the column and the detector demonstrate successful separation and detection of three alkane species. A stackable architecture is proposed as the system integration scheme and a future goal of this effort.
Starting Page	2755
Ending Page	2758
File Size	1996418
Page Count	4
File Format	PDF
ISBN	9781467359832
ISSN	21641641
DOI	10.1109/Transducers.2013.6627376
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-06-16
Publisher Place	Spain
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Detectors Fluid flow Glass Fabrication Sandblasting Gas chromatography Discharges (electric) pulsed discharge Micro gas chromatography Knudsen pump stackable architecture microplasma emission
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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