NDLI: A 2-D directional air flow sensor array made using stereolithography and MEMS micro-hydraulic structures

Content Provider	IEEE Xplore Digital Library
Author	Sadeghi, M.M. Peterson, R.L. Najafi, K.
Copyright Year	2013
Description	Author affiliation: Center for Wireless Integrated MicroSensing & Syst. (WIMS), Univ. of Michigan, Ann Arbor, MI, USA (Sadeghi, M.M.; Peterson, R.L.; Najafi, K.)
Abstract	Here we report a 2-D directional micro-hydraulic hairlike airflow sensor (HAFS), where the hair appendages are made using stereolithography for inexpensive and rapid batch fabrication. The hair structures are optimized to significantly improve the HAFS performance. The maximum measured HAFS sensitivity is 47.9 $fF/(m.s^{-1}),$ a ten-fold increase over our previous uni-directional airflow sensor [1]. The new sensor dynamic range is 0-15 $m.s^{-1},$ with an extrapolated minimum detection limit of about 2 $mm.s^{-1},$ and an angular resolution of 13°.
Starting Page	722
Ending Page	725
File Size	1297845
Page Count	4
File Format	PDF
ISBN	9781467359832
ISSN	21641641
DOI	10.1109/Transducers.2013.6626868
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-06-16
Publisher Place	Spain
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Hair Sensitivity Arrays Sensors Fabrication Micromechanical devices Capacitance capacitive sensors Micro-hydraulic MEMS biomimetic MEMS hairlike sensors air flow sensor stereolithography liquid encapsulation
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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A 2-D directional air flow sensor array made using stereolithography and MEMS micro-hydraulic structures