NDLI: Design, fabrication and Helium Ion Microscope patterning of suspended nanomechanical graphene structures for NEMS applications

Content Provider	IEEE Xplore Digital Library
Author	Annamalai, M. Mathew, S. Viswanathan, V. Fang, C. Pickard, D.S. Palaniapan, M.
Copyright Year	2011
Description	Author affiliation: Signal Processing & VLSI Lab, Department of Electrical and Computer Engineering, National University of Singapore, Singapore (Palaniapan, M.) \|\| Plasmonics & Advanced Imaging Technology Lab, Department of Electrical and Computer Engineering, National University of Singapore, Singapore (Viswanathan, V.; Fang, C.; Pickard, D.S.) \|\| Centre for Integrated Circuit Failure Analysis & Reliability, Department of Electrical and Computer Engineering, National University of Singapore, Singapore (Annamalai, M.; Mathew, S.)
Abstract	This paper investigates the potential uses of graphene nanomechanical devices for NEMS applications fabricated using Helium Ion Microscope (HIM). Suspended nanomechanical graphene drum structures of diameter (∼ 2 – 3 µm) and thickness ranging from few atomic layers (∼10 Å) to about 11 nm have been fabricated and characterized using Atomic Force Microscopy (AFM). The initial suspension profile and the thickness of the fabricated structures have been obtained using AFM. FEM results suggest that these structures can vibrate in the range of several MHz. Their small size and the higher operating frequencies make them well suitable for mass sensing applications with sensitivities greater than $10^{−21}$ g $Hz^{−1}$ which is more than three orders of magnitude improvement over silicon based structures. The initial suspended graphene membranes have been patterned using HIM to obtain multiple z- axis flexures with sub-10nm feature sizes.
Starting Page	2578
Ending Page	2581
File Size	7146221
Page Count	4
File Format	PDF
ISBN	9781457701573
e-ISBN	9781457701566
DOI	10.1109/TRANSDUCERS.2011.5969824
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-06-05
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Nanoelectromechanical systems Helium Microscopy Nanostructures Gold Fabrication Helium Ion Microscope Graphene nanomechanical structure
Content Type	Text
Resource Type	Article

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