NDLI: A resonant cantilever sensor for monitoring airborne nanoparticles

Content Provider	IEEE Xplore Digital Library
Author	Wasisto, H.S. Merzsch, S. Stranz, A. Waag, A. Kirsch, I. Uhde, E. Salthammer, T. Peiner, E.
Copyright Year	2011
Description	Author affiliation: Institute of Semiconductor Technology (IHT), TU Braunschweig, Germany (Wasisto, H.S.; Merzsch, S.; Stranz, A.; Waag, A.; Peiner, E.) \|\| Fraunhofer - WKI, Material Analysis and Indoor Chemistry, Braunschweig, Germany (Kirsch, I.; Uhde, E.; Salthammer, T.)
Abstract	In this paper, a silicon resonant cantilever sensor is used for monitoring airborne nanoparticles (NPs) by detecting the resonant frequency shift that is directly induced by an additional NPs mass deposited on it. A piezoelectric stack actuator and a self-sensing technique using a piezoresistive strain gauge are involved in the sensor system in order to actuate and detect the oscillation of cantilever sensor, respectively. The dielectrophoresis (DEP) method is employed for trapping the airborne NPs in a stable carbon aerosol assessment. A thermal-induced frequency shift is also investigated with the purpose of observing the limitation imposed by thermal effects on the minimum detectable NPs mass. The proposed sensor reveals a mass sensitivity of 8.33 Hz/ng, a fundamental resonant frequency of 43.92 kHz, a quality factor of 1230, and a temperature coefficient of the resonant frequency (TC) of −28.6 ppm/°C. The results demonstrate a possibility of using this resonant cantilever in mobile airborne sensor applications.
Starting Page	1116
Ending Page	1119
File Size	1522617
Page Count	4
File Format	PDF
ISBN	9781457701573
e-ISBN	9781457701566
DOI	10.1109/TRANSDUCERS.2011.5969233
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-06-05
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Resonant frequency Temperature sensors Frequency measurement Silicon Nanoparticles Temperature measurement Carbon dielectrophoresis Resonant cantilever sensor airborne nanoparticles resonant frequency
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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