NDLI: A monolithically integrated 3-axis thermal-convective accelerometer with a pneumatically curved thermopile-cantilever for Z-axis sensing

Content Provider	IEEE Xplore Digital Library
Author	Quan Wang Xinxin Li
Copyright Year	2011
Description	Author affiliation: State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 200050, CHINA (Quan Wang; Xinxin Li)
Abstract	This paper reports a novel monolithic-integrated three-axis convective accelerometer by using a thermopile-embedded curving cantilever for Z-axis sensing. The cantilever down-curving is caused by pneumatic-effect of mutually stress-mismatched two layers. The convective accelerometer consists of a micro heater and several pairs of sensing thermopiles for 3-D temperature-difference detection. In Z-axis acceleration measurement, two pairs of the thermopiles are serially connected as the sensing element. They are located at the ends of the curving cantilevers which are composed of low-stress (LS) SiN/SiOx bi-layer. The structural layer of SiN/SiOx curves down to detect the heat-convection signal in Z-axis. The other two pairs of thermopiles are utilized as reference temperature sensing element and located in the same plane as the micro-heater. The fabricated sensor is tested. Under the heating power of 10mW, the measured X-axis and Yaxis sensitivities are 0.62µV/g/mW and 0.61µV/g/mW, respectively. Under the same condition, the measured Z-axis sensitivity is 0.16µV/g/mW.
Starting Page	2018
Ending Page	2021
File Size	1292649
Page Count	4
File Format	PDF
ISBN	9781457701573
e-ISBN	9781457701566
DOI	10.1109/TRANSDUCERS.2011.5969206
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-06-05
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Accelerometers Robot sensing systems Silicon compounds Temperature measurement Acceleration Heating curving cantilever Convective accelerometer monolithic 3-D sensor thermopile low-stress (LS) SiN
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Design of a monolithic 3-axis thermal convective accelerometer

A novel monolithically integrated pressure, accelerometer and temperature composite sensor

CMOS implementation of a 3-axis thermal convective accelerometer

A micromachined monolithic 3 axis accelerometer based on convection heat transfer

A single-crystal silicon 3-axis CMOS-MEMS accelerometer

An SOI 3-axis accelerometer with a zigzag-shaped Z-electrode for differential detection

Oudheusden, “Integrated thermopile sensors (1989)

A fully integrated three-axis thermal accelerometer

A novel soi Z-axis accelerometer with gap closing differential sensing electrodes

A monolithically integrated 3-axis thermal-convective accelerometer with a pneumatically curved thermopile-cantilever for Z-axis sensing

Similar Documents

Design of a monolithic 3-axis thermal convective accelerometer

A novel monolithically integrated pressure, accelerometer and temperature composite sensor

CMOS implementation of a 3-axis thermal convective accelerometer

A micromachined monolithic 3 axis accelerometer based on convection heat transfer

A single-crystal silicon 3-axis CMOS-MEMS accelerometer

An SOI 3-axis accelerometer with a zigzag-shaped Z-electrode for differential detection

Oudheusden, “Integrated thermopile sensors (1989)

A fully integrated three-axis thermal accelerometer

A novel soi Z-axis accelerometer with gap closing differential sensing electrodes

A monolithically integrated 3-axis thermal-convective accelerometer with a pneumatically curved thermopile-cantilever for Z-axis sensing