NDLI: Silicon retainer ring integration in micro-turbine with thrust ball bearing support mechanism

Content Provider	IEEE Xplore Digital Library
Author	Hergert, R.J. Hanrahan, B. Holmes, A.S. Ghodssi, R.
Copyright Year	2011
Description	Author affiliation: Optical and Semiconductor Devices Group, Department of Electrical and Electronics Engineering, Imperial College London, UK (Hergert, R.J.; Holmes, A.S.) \|\| MEMS Sensors and Actuators Laboratory, Department of Electrical and Computer Engineering, Institute for Systems Research, University of Maryland College Park, USA (Hanrahan, B.; Ghodssi, R.)
Abstract	This work demonstrates the first integration of a microfabricated silicon retainer ring packaged within a silicon micro turbine (SMT) employing a thrust micro ball bearing. Retainer rings, common in macro-scale ball bearings, provide uniform spacing between the balls and reduce the number of balls required for stable operation. Previous work on integrated silicon retainer rings for radial micro ball bearings has shown stable operation, and microfabricated thrust ball bearings have been demonstrated as viable support systems for micro-pumps and -motors. In this work several retainer ring designs are implemented within thrust-oriented ball bearings, showing stable and repeatable operation in testing for over 500,000 revolutions.
Starting Page	1344
Ending Page	1347
File Size	2628807
Page Count	4
File Format	PDF
ISBN	9781457701573
e-ISBN	9781457701566
DOI	10.1109/TRANSDUCERS.2011.5969503
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-06-05
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Turbines Silicon Steel Skeleton Ball bearings Performance evaluation Fabrication rotary MEMS Micro turbine micro ball bearing
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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