NDLI: Control of MEMS on the edge of instability

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2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference

Conference at a glance

Conference organizers

Conference sponsors

Letter from the chairs

Table of contents

New trends of MEMS/NEMS based on heterogeneous process integration - Towards life/green innovation -

Vacuum microsystems for energy conversion and other applications

Microfluidic solutions for miniaturization, integration, automation and parallelization of tests on commercially available instruments

Phase-locked drive loop with amplitude regulation based on phase-shifting for gyroscopes

Design of T-shape vector hydrophone based on MEMS

A CMOS capacitive pressure sensor chip for fingerprint detection

GaAs/InAs/GaAs/AlAs resonant tunneling diodes for novel MEMS gyroscope application

A wideband anti-high-overload thermoelectric microwave power sensor based on GaAs MMIC technology

A 3-axis accelerometer and strain sensor system for building integrity monitoring

A new low consumption 3D compass using integrated magnets and piezoresistive nano-gauges

Out-of-plane axis SOI MEMS gyroscope with initially displaced vertical sensing comb

Electrical performance optimization of a silicon-based EUV photodiode with near-theoretical quantum efficiency

A new N/MEMS-based nonvolatile circuit

Cylinder-shaped thermal inertial force sensor for wearable fabric sensor systems

High bandwidth electron tunneling trasnducer using frequency downmixing readout of nanomechanical motion

Attached-type flexible flow sensor for air conditioning network systems

A CMOS wireless two-axis digital accelerometer using bondwire inertial sensing

Damping characteristics of a micromachined piezoelectric diaphragm-based pressure sensor for underwater applications

Compact electrode design for in-plane accelerometer on SOI with refilled isolation trench

Microfluidic microsystem for magnetic sensing of nanoparticles with Giant Magneto-Impedance technology

First high-g measurement by thermal accelerometers

Effect of Knudsen number on maximum response of a Thermal Conductivity Detector

Three dimensional photoacoustic imaging using a monolithic CMOS MEMS capacitive ultrasonic sensor

An aerodynamically efficient sphere anemometer with integrated hot-film sensors for 2-D environmental airflow monitoring

A filter - less multi - wavelength fluorescence detector

Multi-parameters decoupling method with Lamb wave sensor for improving the selectivity of label-free liquid detection

A flexible integrated micromachined hot-film sensor array for measuring surface flow vector

A high-sensitive ultra-thin MEMS capacitive pressure sensor

Zero temperature coefficient gas-sealed pressure sensor using mechanical temperature compensation

Hydrogen sensor based on palladium nanotube arrays fabricated by novel low-temperature hydrothermal synthesis

Turn-on lasing sensory mechanism for vapor detection of amines with metallophenylporphrin doped polyfluorene

Analysis of C and C hydrocarbon gas mixtures using miniaturized gas chromatography and SnO gas detectors

Micromechanical olfactory system for sensitive and selective detection of explosives

Sensing charateristics of RNA oligomer coated SWNT gas sensors

A miniaturized networked sensor for trace explosives

Mixed-potential type NO sensor using stabilized zirconia and Cr nanocomposites

High-performance of planar NO sensor using stabilized zirconia and NiO sensing electrode synthesized by microwave at high temperature

Improvement in selectivity of NO sensors based on WO thin films with MnO filters deposited by radio frequency sputtering

UV-enhanced room temperature gas sensor based on hollow sphere SnO

DMMP vapor detection with 50NM thick AlN films based microcantilevers

Novel palladium nanorod electrode ensemble for electrochemical evaluation of hydrogen adsorption

Hydrogen gas sensing performance of a Pt/graphene/SiC device

Nasicon-based potentiometric Cl sensor using Cr sensing electrode

Thin film gas sensor for detection of toxic gases from microbial

A fully integrated, high-throughput, multi-parametric flow cytometry chip using “microfluidic drifting” based three-dimensional (3D) hydrodynamic focusing

Recording of neural activity of mouse retinal ganglion cells by means of an integrated high-density microelectrode array

Pathogen detection using microfluidic bead-based polymerase chain reaction

Parallel focusing and switching of leakage flux from magnetic loop for on-chip patterning of magnetically labeled cells

Parylene microprobes with engineered stiffness and shape for improved insertion

Mechanical and electrical evaluation for the long-term stability of implanted 3D retinal microelectrode

Reusable high-frequency electrodeless QCM biosensor with a bare quartz resonator embedded in a silicon microchannel

Integrated microfluidic loop-mediated-isothermal-amplification systems for rapid isolation and detection of aquaculture pathogens

Easy and stable lipid bilayer formation: A droplets-contacting-method in parylene mircopores for multiple ion channel recordings

An integrated lobule-mimetic liver chip for testing hepatotoxicity

Microfluidic device to perform impedometric detection of Activated Partial Thromboplastin Time of blood

A high-performance microsystem for isolating viable circulating tumor cells

Finger-powered microdroplet generator

On-chip gelation of temporally controlled alginate microdroplets

High-performance protein preconcentrator using microchannel-integrated nafion strip

Optical-driven vortex as a microparticle concentator

Marangoni-driven micromotor in liquid medium

An electrostatically actuated parylene microvalve for lab-on-a-chip applications

A novel narrow mist spray device using surface acoustic wave with a channel

High-yield blood plasma separation by modulating inertial migration in a contraction-expansion array microchannel

MEMS silicon-based resistojet micro-thruster for attitude control of nano-satellites

Rolling, aligning, and trapping droplets on a laser beam using marangoni optofluidic tweezers

A hybrid electrokinetic bioprocessor for static and dynamic pathogen manipulation in physiological samples

Size fractionation of primary muscle cells using hydrodynamics in microchannels

2-dimensional separation of biomimetic particles by stopped-flow centrifugo-magnetophoresis

Untethered microrobot actuated by an electromagnetic field with an acoustically oscillating bubble for bio/micro-object manipulation

Microeddy design and application for single cell trapping and monitoring

In-situ closed loop hydrogel membrane formation by one step stamping

A multiplexed microfluidic impedance sensor for high throughput analysis of microparticles

High-efficiency blood separation utilizing spiral filtration microchannel with gradually varied width

A double trapped single cell contact and interaction system via movable poly (ethylene glycol) diacrylate (PEG-DA) microstructure for immune analysis

Microfluidic valves based on TiO coating with tunable surface wettability between super hydrophilic and super hydrophobic

Fluorescence enhancement via single-core liquid waveguides in microfluidic channels

Laser-actuated micro-valves and micro-pumps

Micro-liquid handling on paper analysis chip triggered by ink-jet droplet

Light-directed migration of D. discoideum slugs in microchannels

A miniaturized optically-induced fluorescence-activated cell sorter

Diode characteristic of electrolyte-oxide-semiconductor structure for potential chemical and biological applications

Low-temperature zero-level packaging technique using photosesitive film type PerMX polymer

Reliability of micro-hotplates on polyimide foil

Electrical connection using submicron porous gold bumps for wafer-level packaging of mems using anodically-bondable LTCC wafer

Material optimization of phosphorus-doped polycrystalline silicon germanium for miniaturized thermoelectric generator

Monocrystalline thin-film waferlevel encapsulation of microsystems using Porous Silicon

Black silicon with sub-percent reflectivity: Influence of the 3D texturization geometry

Increase in mechanical strength by scalloping removal

Enhanced dynamic electromechanical properties of electrophoresis assembled carbon nanotube-polymer piezoelectric transducers

Low temperature Pyrex/silicon wafer bonding via a single intermediate parylene layer

Continuous photolithography system and technology for fiber substrate

A genetic algorithm based Kinetic Monte Carlo simulation for the evolution of complex surface in anisotropic wet etching

High density 256-channel chip integration with flexible parylene pocket

Wafer-level two-step bonding process for combined sensor with two different pressure chambers

Self-assembly and transferring of photoresist as planar layer for fabrication of TSV and free standing beams

Adhesion-enhancing surface treatments for parylene deposition

Precise cell trapping with structure-confined dielectrophoresis

Low-cost fabrication of PMMA and PMMA based magnetic composite cantilevers

A transfer method for complex structures fabricated on non-planar surfaces

A broadband 3D package for RF MEMS devices utilizing through silicon vias (TSV)

A single-wafer-based single-sided bulk-micromachining technique for high-yield and low-cost volume production of pressure sensors

The integration of CNTs-based flexible tactile sensor and flexible circuit by polymer molding process

Low-stress wafer-level transfer bonding of polymer layers using floatation

A parylene-led wingbeating indicator for visual remote sensing

Engineering application of MEMS vector hydrophone and self-adapting root-MUSIC algorithm

Capacitive detection of nanoliter droplets on the fly - investigation of electric field during droplet formation using CFD-simulation

Towards measurement of the Casimir force between parallel plates separated at sub-micron distance

The investigation of point defect modes of phononic crystal for high Q resonance

Dynamic optimization of valveless micropump

Time-dependent cell membrane damage under mechanical tension: Experiments and modeling

Use of a new anisotropic etching simulator on quartz crystal

Characteristics of inverted pyramidal microdischarge devices operating in CHF and CHF/Ar for maskless microplasma etching

Pulsed Evaporative Transient Thermometry on isolated microstructures

Micro-beam actuator based on conducting interpenetrating polymer networks: From patterning process to actuation in open air

A novel SU-8 electrothermal microgripper based on type synthesis of kinematic chain method

Design and characterization of a low-voltage piezoelectrically actuated polymer membrane

A latchable high-pressure composite valve actuator combining paraffin and a low melting point alloy

Electromechanical coupling of polypyrrole trilayer actuators

A novel miniaturization actuator using a symmetric piezoelectric pusher element for pocket sun-tracking system

Gan comb-drive actuators on Si substrate

Rapid and repeated bolus drug delivery enabled by high efficiency electrochemical bellows actuators

Cymbal type Piezo-Polymer-Composite actuators for active cancellation of flow instabilities on airfoils

A MEMS microgripper with changeable gripping tips

Capacitive frequency tuning of ALN micromechanical resonators

Influence of the A-F effect on the temperature stability of silicon micromechanical resonators

Verification of the phase-noise model for MEMS oscillators operating in the nonlinear regime

Micro disk resonator with on-disk piezoelectric thin film transducers for integrated MEMS ubiquitous applications

Novel MEMS oscillator using in-plane disk resonator with sensing platform and its mass sensing characteristics

An EWOD driven millimeter-wave phase shifter using a movable ultrasoft metalized PDMS ground plane

Piezoelectric ALN MEMS resonators with high coupling coefficient

An absorptive filter using microfluidic switchable metamaterials

Mode-selective optical filtering and wavelength-selective switching through Fabry-Perot cavity with cylindrical reflectors

Speckle reduction in laser displays using a MEMS tandem modulator

A novel electromagnetic microactuator with lateral magnetio-static force for scanning micromirror device

Micromachined array-type Mirau interferometer for MEMS metrology

A thermal tunable bulk-micromachined optical filter

Micro-mirrors connected in series for loss-mechanism study and low-voltage operation

Design, fabrication, and vacuum package process for high performance of 2D scanning MEMS micromirror

A novel dual screen projection system using balance-type micromirror with piezoelectric actuator

Novel ultra-lightweight and High-resolution MEMS X-ray optics for space astronomy

Varifocal scanning micro-mirror fabricated from silicon-on-insulator wafer

Metal-based piezoelectric MEMS scanner mirrors composed of PZT thin films on titanium substrates

Process optimization and performance analysis of an electrostatically actuated varifocal liquid lens

A Nano-opto-mechanical pressure sensor

Hollow core MOEMS Bragg grating microphone for distributed and remote sensing

2D imaging with 1D LED array integrated FR4 actuator

Micro-Opto-Mechanical technology for the fabrication of highly miniaturized fiber-optic ultrasonic detectors

Continuous membrane deformable mirror for adaptive optics using bimorph spring

Formation of silicon nano tips using post SAM-based wet etching

High-performance surface-tension-driven capillary pumping based on layer-by-layer self assembly of TiO nanoparticles

Gold membranes with large arrays of sub-μm holes fabricated by wafer-scale Nanosphere Lithography

Enhanced electro-mechanical performance of TiO nano-particle modified polydimethylsiloxane (PDMS) as electroactive polymers

Electrical insulation of carbon nanotube separation columns for microchip electrochromatography

Technology and characteristics of microhumidity sensors

Suspended carbon nanotube thin film structures with high degree of alignment for NEMS switch applications

Measurement of shear stress between single-wall carbon nanotubes and substrates using NEMS devices

A new platform for assembly of carbon nanotubes on nano sensors by utilizing optically-induced dielectrophoresis and dielectrophoresis

Growth of horizontally aligned carbon nanotubes from designated sidewalls of DRIE-etched silicon trench

Wafer-level fabrication of nanoscale patterned sapphire substrates with broadband optical transmittance

Dielectric constants of PDMS nanocomposites using conducting polymer nanowires

Vertical silicon nano-pillar for non-volatile memory

Microparticle trapping and manipulation by optical force in double coupled ring resonator (DCRR) via wavelength tuning

A self-sustaining pyroelectric energy harvester utilizing spatial thermal gradients

A flat high performance micro energy harvester based on a serpentine coil with a single winding

A micro energy harvester with 3D wire bonded microcoils

Thermal energy harvesting using shape memory/piezoelectric composites

A new approach of a shape-optimized piezoelectric MEMS generator for fluid-actuated energy scavenging

Power switch system based on Microelectromechanical switch

Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting

Piezoelectric MEMS energy harvesting module based on non-resonant excitation

Non-contact repulsive-force excitation for highly endurable wide frequency-range energy-harvesting

Passive-self-tunable vibrational energy harvester

Ultra-high precision MEMS accelerometer

A reel-to-reel compatible printed accelerometer

Monolithic-integrated silicon bulk-micromachined accelerometer and pressure-sensor for tire-pressure-monitoring-system (TPMS) application

A fourth order unconstrained ΣΔ capacitive accelerometer

Carbon nanotubes-integrated inertial switch for reliable detection of threshold acceleration

Sensitivity linearization technique for a time based MEMS accelerometer

MEMS ultrasonic transducers for highly sensitive Doppler velocity sensor for low velocity measurement

Amorphous silicon-coated CNT forest for energy storage applications

A hierarchical approach for the fabrication of three-dimensional microbattery electrodes

Power enhancement of micro thermoelectric generators by micro fluidic heat transfer packaging

Energy harvesting from a rotating gear using an impact type piezoelectric MEMS scavenger

Design, modeling, fabrication and characterization of an electret-based MEMS electrostatic energy harvester

Green vehicle shock absorber: Micromachined wavy shaped piezoelectric cushion energy harvester and its power generating demonstration based on real navigation

Large array electrospun PVDF nanogenerators on a flexible substrate

Specific cell capture and temperature-mediated release using surface-immobilized aptamers in a microfluidic device

Single cell real time secretion assay using amorphous fluoropolymer microwell array

MEMS mass sensors with uniform sensitivity for monitoring cellular apoptosis

Mechanical stimulator of cultured vascular endothelial cell for investigation of drug permeability of blood vessel

Pulsatile shear stress and high glucose concentrations induced reactive oxigen species production in endothelial cells

Protozoon classifications based on size, shape and refractive index using on-chip immersion refractometer

Diagnostic device for cow mastitis based on the detection of superoxide secreted from neutrophils

Integrated silicon-based chemical microsystem for portable sensing applications

Frequency-multiplexed combinatory mass sensing with single data line from multiple integrated film bulk acoustic resonators

Ultra-low power palladium-coated MEMS resonators for hydrogen detection under ambient conditions

Locally synthesized metal oxide nanowire-devices and their gas sensing applications

Single chip Nanotube sensors for chemical agent monitoring

Field testing of a rugged MEMS gas chromatograph prototype: Selective analysis of trace-level TCE vapors in contaminated homes

A pressure programmable gas chromatography microsystem utilizing motionless Knudsen pump, fiber-integrated optical detector, and silicon micromachined separation column

MEMS technology development and manufacturing in a CMOS foundry

A $400×400µm^{2}$ 3-axis CMOS-MEMS accelerometer with vertically integrated fully-differential sensing electrodes

Integration and packaging technology of MEMS-on-CMOS tactile sensor for robot application using molded thick BCB layer and backside-grooved electrical connection

A differential difference amplifier with automatic gain selection as readout interface for CMOS stress sensors in orthodontic brackets

A Frenkel-Poole model of dielectric charging in CMOS MEMS

2×2 MIMO, multi-mode, wideband transceiver system for worldwide m-WiMAX (IEEE 802.16e) / WLAN (IEEE 802.11n) applications

RF MEMS switches integrated with sealed suspended coplanar waveguides for reconfigurable RF circuits

Voltage programmable dual-band bandpass/bandstop filter response in a single micro-electro-mechanical device

Nano-electromechanical storage element for a low power complimentary logic architecture using PZT relays

Spontaneous oscillation due to charging effect in MEMS RF switches

Programmable self-assembly for microsystem integration

Low temperature encapsulation of nanochannels with water inside

Electro-wetting enhanced bonding strength

Polymeric droplet deposition and self-release forming micro parts on heterogeneous surfaces

Orientation-specific self-assembly at air-water interface using magnetic field

Nanobiodevice based single molecule and cell sensing for cancer diagnosis and in vivo imaging for stem cell therapy

Nanopore DNA sensors in CMOS with on-chip low-noise preamplifiers

DNA microarrays immobilized on unmodified plastics in a microfluidic biochip for rapid typing of Avian Influenza Virus

Ultra-sensitive carbon nanotubes for single-molecule detection of DNA hybridization kinetics using conductance-based correlation spectroscopy

Motor protein motion along microtubules for molecular detection

Single chip flow sensing system with a dynamic flow range of more than 4 decades

Capacitive absolute pressure sensor with independent electrode and membrane sizes for improved fractional capacitance change

Barometric pressure change measurement

Saw-Pirani vacuum sensor with a new functioning mode and a fast response time

A highly sensitive flexible pressure and shear sensor array for measurement of ground reactions in pedestrian navigation

Miniature ultrasound acoustic imaging devices using 2-D pMUTs array on epitaxial PZT/SrRuO/Si structure

In situ wafer-level polarization of electret films in MEMS acoustic sensor arrays

One-dimensional linear acoustic bandgap structures for performance enhancement of AlN-on-Silicon micromechanical resonators

A 1.75 GHz piezoelectrically-transduced SiC lateral overmoded bulk acoustic-wave resonator

High performance bulk mode gallium nitride resonators and filters

Engineering of acoustic metamaterials with application to MEMS BAW resonators

High-Q, large-stopband-rejection integrated CMOS-MEMS oxide resonators with embedded metal electrodes

Very high frequency double-ended tuning fork nano-mechanical Fin-FET resonator

Encapsulated mechanically coupled fully-differential breathe-mode ring filters with ultra-narrow bandwidth

High-Q in-plane resonance-mode cantilever bio/chemical sensor for real-time detection in liquids

Semipermeable parylene membrane as an artificial Bruch's membrane

Label-free real time imaging of neural communication using acetylcholine image sensor

New class of chronic recording multichannel neural probes with post-implant self-deployed satellite recording sites

Multilayer phased microcoil array for magnetic resonance imaging

A flexible fish-bone-shaped neural probe strengthened by biodegradable silk coating for enhanced biocompatibility

A MEMS differential affinity sensor for continuous glucose detection

Wafer-level thin film vacuum packages for MEMS using nanoporous anodic alumina membranes

Direct wafer bonding of atomic layer deposited TiO and Al thin films

A wafer-level poly-sige-based thin film packaging technology demonstrated on a soi-based high-Q MEM resonator

Wafer level packaging based on AU-AU bonding for a CMOS compatible thermal wind sensor

Investigations of thermocompression bonding with thin metal layers

Conformal coating of poly(glycidyl methacrylate) as a lithographic polymer by initiated chemical vapor deposition

Heated membranes prevent clogging of apertures in nanostencil lithography

Improvement of CMOS-MEMS accelerometer using post-CMOS selective electroplating technique

Monolithic pressure+acceleration sensor with self-test function for reliable & low-cost tire-pressure-monitoring-system (TPMS) applications

An SOI 3-axis accelerometer with a zigzag-shaped Z-electrode for differential detection

Piezoelectric switch to activate event-driven wireless sensor node by several Hz of vibration

MEMS sensor with giant piezoresistive effect using metall-semiconductor hybrid structure

Transparent touch panel with conductive liquid channel structure

Design and implementation of a novel CMOS MEMS condenser microphone with corrugated diaphragm

Pressure sensor using Nano-opto-mechanical Systems (NOMS)

A high sensitivity SOI electric-field sensor with novel comb-shaped microelectrodes

Self-cleaning mass calibration of a thermogravimetric device using a thin-film molybdenum

Theoretical analysis on gyroscopic effect in surface acoustic waves

A robust micro mechanical-latch shock switch with low contact resistance

A novel integrated transparent flexible tactile sensor

Fabrication and testing of a high resolution extensometer based on resonant MEMS strain sensors

Micro-cantilevers for non-destructive characterization of nanograss uniformity

In-process parameter calibration of thermoelectrical flow sensors with monolithic integrated channel

An in-plane cobalt-nickel microresonator sensor with magnetic actuation and readout

AlN based piezoelectric force sensor for energy autonomous sensor systems

A CMOS compatible polycrystalline silicon-germanium based piezoresistive pressure sensor

Development of a strain sensor for rolling contact loads

AC characterisation of thermal flow sensor with fluid characterisation feature

Novel method for gated inductive readout for highly sensitive and low cost viscosity and density sensors

Modulated electro-mechanical continuous-time lowpass sigma-delta-modulator for micromachined gyroscopes

Deflection amplification mechanism in a capacitive accelerometer

Novel single-device “XOR” AND “AND” gates for high speed, very low power LSI mechanical processors

Design and implementation of an extremely large proof-mass CMOS-MEMS capacitive tilt sensor for sensitivity and resolution improvement

Measurement of the magnitude and direction of magnetic field by a micromachined cantilever

On the relative sensitivity of mass-sensitive chemical microsensors

A resonant cantilever sensor for monitoring airborne nanoparticles

Gold nanoparticles immobilized quartz crystal microbalance biochip with ultrasonic standing wave enhancement for real-time sensing protein-ligand interaction

Ozone senosr using ZnO based film bulk acoustic resonator

Measuring the frequnecy resolution of a multi degree of freedom resonator for mass detection

PH measurements with ZvO based Surface Acoustic Wave Resonator

CO measurement using an AlN/SI SAW sensor

Surface acoustic wave gas sensor for monitoring low concentration ammonia

Advances in polymer-coated surface acoustic wave gas sensor

A microfabricated preconcentrating device for exhaled breath analysis

Flexible polymer humidity sensor fabricated by inkjet printing

A textile integrated sensor system for monitoring humidity and temperature

FEM modeling SAW humidity sensor based on ZnO/IDTs/AlN/Si structures

Rapid hormone immunosensor with fluid control mechanism

Fluorene-thiophene-based thin-film fluorescent chemosensor for methamphetamine vapor

Localized electroporation of mouse embryo using dielectric guides

Rapid on-site measurement of the freshness of rice on a micro electrochemical device

An all-digital, time-gated 128X128 spad array for on-chip, filter-less fluorescence detection

Magnetic microheaters for cell separation, manipulation, and lysing

Multi-site electroretinogram recordings inside isolated mouse retina using flexible spatially arranged microelectrode probes

A micro device for impedance and mechanical characterization of biological cells

Low cost and high specific anesthetic biosensors with functionally imprinted nanocavities on polymer films

High-density microelectrode array system and optimal filtering for closed-loop experiments

Evaluation of the packaging and encapsulation reliability in fully integrated, fully wireless 100 channel Utah Slant Electrode Array (USEA): Implications for long term functionality

Wireless recharging of battery over large distance for implantable bladder pressure chronic monitoring

Flexible micro-tactile sensor for normal and shear elasticity measurements

Development of a microfluidic device with microcantilever sensor array for probing single cancer cells mechanics

Animal experimental study on the nerve root retraction with a silicon pressure sensor

Individually-addressable parylene microneedle arrays with integrated microchannels for retinal prosthesis study

Preliminary thermal characterization of a fully-passive wireless backscattering neuro-recording microsystem

A Fabry-Pérot pressure sensor fabricated on left ventricular assist device for heart failure implant

An integrated microfluidic system for interstitial fluid transdermal extraction

Acoustic tweezers: Achieving quasi-dynamic micropartcile patterning using tunable surface acoustic waves

A microfluidic control system with re-usable micropump/valve actuator and injection moulded disposable polymer lab-on-a-slide

Digital liquid-liquid microextraction

Dynamic effects of droplet impingement on nanotextured surface for high efficient spray cooling

Optimization of liquid dielectrophoresis (L-DEP) based devices towards conductive biological liquids handling

Milliliter-to-microliter platform for on-demand loading of aqueous and non-aqueous droplets to digital microfluidics

Conductometric and optical sensing of stimuli senssitive hydrogels inside microfluidic channels

Deposition of carbon nanoparticles using optically induced dielectrophoretic force

Dynamically controllable concentration gradient generator for studying cellular response to chemical instigation

Rotationally controlled centrifugo-pneumatic valving utilizing dissolvable films

Focusing microparticles in a microfluidic channel with ferrofluids

Planar on-chip flow cytometer using evanescent waves based on liquid total internal reflection (L-TIR)

Frictional drag reduction in microchannel using slip on convex air bubbles naturally formed in a specifed a cavity

A microfluidic mixer based on parallel, high-speed circular motion of individual microbeads in a rotating magnetic field

Active surface tension driven micropump using droplet/meniscus pressure gradient

Optoelectronic tweezers integration with multilayer microfluidic device using SWNT embeded PDMS membrane electrode

Wirelessly actuated microvalve system using induction heating and its thermal effect on the microfluidic system

A bistable shape memory microvalve for three-way control

High-speed delivery of microbeads in microchannel using magnetically driven microtool

High throughput separation of blood cells by using hydrodynamics and magnetophoresis

A microfluidic “treadmill” for sperm selective trapping according to motility classification

Comb-drive III-nitride micro mirror fabricated by fast atom beam etching

Fabrication of micropatterns on channel sidewalls using strain-recovery property of a shape-memory polymer

Room-temperature reactive bonding by using nano scale multilayer systems

Laser annealed SiGe devices for MEMS applications at temperatures below 250°C

Plasma enhanced bonding of polydimethylsiloxane (PDMS) with parylene

Silicon retainer ring integration in micro-turbine with thrust ball bearing support mechanism

Transfer technology of pyrolyzed polymer onto low thermal tolerance substrate

Novel post-process gap reduction technology of high aspect ratio microstructures ultilizing micro welding

Inkjet printing on paper for the realization of humidity and temperature sensors

Room-temperature wafer-level vacuum sealing by compression of high-speed wire bonded gold bumps

A study of surface diffusion of metals in tungsten for NEMS applications

Crack propagation direction control for crack-less solder bonding using Al/Ni flash heating technique

Dispense and self-planarization process on a modified surface for multiple height 3-D microfabrication

Influence of thermal treatment on mechanical characteristics of Al-Si-Cu thin films evaluated by biaxial tensile testing

Refined Si-CMOS-MEMS process using AOE, drie and preform bonding

Low-temperature sealing for optical microsystem packages using Au-Au surface activated bonding in atmospheric pressure environment

Efficient solution to selective wet etching of ultra-thick copper sacrificial layer with high selective etching ratio

Electrodeposition and characterization of CoNiMnP permanent magnet arrays for MEMS applications

A polymer stacking process with 3D electrical routings for flexible temperature sensor array and its heterogeneous integration

The sensitivity of stiction performance to surface chemistry under various humidity regimes

Design of precision light intensity modulation for light-addressable potentiometric sensor

Thin film thermal conductivity metrology using photoluminescence of quantum dots

A novel stress isolation guard ring design for the improvement of three-axis piezoresistive accelerometer

Modeling of the elastic modulus of crystalline silicon based on a lattice dynamics approach

Assessing polymer sorption kinetics using micromachined resonators

Nonlinear air drag damping of torsional microscanners

Microfluidic flow meter and viscometer utilizing flow-induced vibration on an optic fiber cantilever

Effect of loading rates on polymer micropillar based force transducers

Design and experiments of a Nano-opto-mechanical switch using EIT-like effects of coupled-ring resonator

Novel, simple, and Q-independent self oscillation loop designed for vibratory MEMS gyroscopes

Walking of a magnetically bipedal microrobot

Control of the radial motion of a self-propelled microboat through a side rudder

RApid prototyping of 3D microstructures by direct printing of liquid metal at temperatures up to 500°C using the starjet technology

Characterization of the $2^{nd}$ generation magnetic microbearing with integrated stabilization for frictionless devices

Monodisperse microparticle generation from aqueous solutions

Integrated thin-film piezoelectric traveling wave ultrasonic motors

Nano-opto-mechanical actuator driven by optical radiation force

Disposable microfluidic vacuum modules using inductively-triggered transformative polymers for point-of-care diagnostics

A hybrid vertical comb-drive actuator supported by flexible pdms suspensions

Silicon linkage with novel compliant mechanism for piezoelectric actuation of an intraocular implant

Thermally-actuated high speed droplet manipulation platform

Wideband tunable love wave filter using electrostatically-actuated MEMS variable capacitors integrated on lithium niobate

Synchronized oscillation in micro mechanically coupled opposite C-shaped cantilever-based oscillator system

Piezoelectric micro-scale tuning fork resonators for sensing applications

CMOS-MEMS transverse-mode square plate resonator with high Q and low motional impedance

A tunable laser using double-ring resonator external cavity via free-carrier dispersion effect

Dry etching method using double-layered etching mask for modulating shape of deep-etched quartz surface

Quality factor enhancement in lamb wave resonators utilizing AlN plates with convex edges

A state-converting inline RF MEMS power sensor using GaAs MMIC technology

Laterally-excited silicon bulk acoustic resonators with sidewall AlN

A monolithic MEMS michelson interferometer for ftir spectroscopy

A novel vacuum-packaged low-power scanning mirror with inclined 3D-shaped window

Tunable photonic crystal with 50 nanometer tuning range and 100 millisecond response time

Cavity optomechanical sensors

An apodized surface grating coupler enabling the fabrication of silicon photonic nanowire sensor circuits in one lithography step

Transmissive color shift through layered sub-wavelength gratings based on plasmon enhanced coupling

Integrated tracking and focusing micro lens actuators based on silicon bulk micromachining

Bistable optofluidic attenuator with integrated electrowetting actuation and high dynamic range

Low power PECVD SIC delay lines for optical coherence tomography in the visible

Adaptive piezoelectric axicon mirrors for high power femtosecond laser applications

Temporal modulation of x-rays using MEMS micromirrors

Multifunctional optical MEMS sensor platform for wireless optical sensor networks

1-D electro-optic beam steering device

Design and fabrication of mechanical resonance based scanning endoscope

Silicon bulkmicromachined piezoelectrically actuated corner cube retroflector

A micro camera utilizing a microlens array for multiple viewpoint imaging

Indirect wavelength selective infrared emitter using surface plasmon polariton

IC compatible top down process for Silicon Nanowire fet arrays with three {100} surfaces for (BIO) chemical sensing

Light-actuated CNT-doped elastomer blisters towards braille dots

Chemoresistivity of solid state layers of porphyrin nanotubes

Magnetoresistance behaviors of undoped and N-doped graphene grown by CVD method

Diagnostic of microplasma reactor for scanning plasma etching

Electrostatic gating of ion and molecule transport through a nanochannel-array membrane

Functionalization of ceramic liposomal nanoparticles, cerasomes, with antibodies

3D microelectrode based on integrated micro and nano architectures

Fabrication of plasma probe for chemical vapor deposition

Plastic deformation of microstructures using carbon nanotubes film as latching surface

Fabrication of 3-D hybrid polymer-magnetite nanostructures with geometric shape anisotropy

Nano-photonic displacement sensing mechanism

2D photonic crystal TM polarizer fabricated by one-step combined nanoimprint and photolithography

Biocompatible AlN-based piezo energy harvesters for implants

Photovoltaically rechargeable fuel cell accumulator for energy self-sufficient microsystems

Thinned-PZT on SOI process and design optimization for piezoelectric inertial energy harvesting

Highly scalable and sensitive broadband 1Hz ∼ 1kHz vibrated energy harvester with novel self-alternation magnetic-flux and 3D coils

Microelectromagnetic energy harvester with integrated magnets

Harvesting traffic-induced bridge vibrations

A micro initiator realized by reactive Ni/Al nanolaminates for MEMS applications

Study of vibration-induced broadband flexible piezoelectric ZnO micro-harvester with storage system

Liquid-encapsulated energy harvester for low frequency vibrations

Self-powered high signal-to-noise ratio acoustic emission sensor and its demonstration on detecting dynamic friction variation

An active matrix arrayed microphone with acoustic bandwidth response

Nonlinear vibration in resonant silicon bridge pressure sensor: Theory and experiment

Analysis of acoustic radiation and viscous damping on the vibration of piezoelectric circular microdiaphragms

Mixed-level modeling of squeeze film damping in MEMS: Simulation and pressure-dependent experimental validation

Subpixel translation of MEMS measured by discrete fourier transform analysis of CCD images

A novel test method for simultaneous measurement of thermal conductivity, CTE, residual stress and Young's modulus of suspended thin films using a laser doppler vibrometer

A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications

Nano-opto-mechanical linear actuator utilizing gradient optical force

Novel tweezers using acoustically oscillating twin bubbles

Hygroscopic biomimetic transducers made from CNT-hydrogel composites

A functional microprobe integrated with sharp tip and huge deflection crank-slider structural cantilever for versatile instrument

3D omnidiectional contollable elastic IPMC tweezer with self-sensing and adjustable clamping force abilities for biomedical applications

A micro electrostatic linear accelerator based on electromagnetic levitation

Bionano crystallized poly-Si film for increasing tensile stress in MEMS/NEMS device structures

Three dimensional nanoscale fabrication and modeling of dynamic mode multidirectional UV lithography

Electrical catching and transfer of nanoparticles via nanotip silicon probe arrays

Bioassisted selective-capture and release of nanoparticles toward application on microfluidic devices

Layer-by-layer deposition of colloidal semiconductor nanocrystals for integration of infrared photon-detectors on 3D topography

A NEMS optical switch driven by optical force

Gate-all-arround single-crystalline silicon nanowire optical sensor

Continuous flow layer-by-layer microbead functionalization via a micropost array railing system

In-situ generation and shrinkage of monodisperse water-in-oil emulsion for femtoliter compartmentalization using capillary traps

An active gyroscopic magnetic micromixer for rapid fluid mixing in droplet based microfluidic systems

High-speed pulsed mixing with high-frequency switching of micropump driving and its application to nanoparticle synthesis

Inertial particle focusing in parallel microfluidic channels for high-throughput filtration

Awafer-level, heterogeneously integrated, high flow SMA-silicon gas microvalve

A passive check valve using microspheres for low pressure and low flow rate applications

Microball bearing technology for MEMS devices and integrated microsystems

A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics

Die-level TSV fabrication platform for CMOS-MEMS integration

Planar MEMS RF capacitor integration

Cortical blood flow imaging with a portable MEMS based 2-photon fluorescence microendoscope

Photothermal nanoblade for large cargo delivery into mammalian cells

Multispectral analysis of cancer cells using quantum dot leds patterned on-chip

Portable oral cancer detection using miniature confocal imaging probe with large field of view

Efficient and high-throughput electroporation chips

Multi-site monitoring of choline and glutamate using biosensor microprobe arrays in combination with CMOS circuitry

A compact Hall-effect sensor array for the detection and imaging of single magnetic beads in biomedical assays

3D lobule-mimetic chip via positive Dielectrophoresis force with sinusoidal spacing poly (ethylene glycol)-diacrylate microwalls

Residual stress-free 100 MHz PZT-based concave diaphragm resonator for label-free protein-ligand biosensing with self-enhancing mechanism

Microsystems for energy harvesting

A micro Tesla turbine for power generation from low pressure heads and evaporation driven flows

Design and microfabrication of integrated magnetic MEMS energy harvester for low frequency application

Highly efficient piezoelectric micro harvester for low level of acceleration fabricated with a CMOS compatible process

A millimeter-sized electret-energy-harvester with microfabricated horizontal arrays and vertical protrusions for power generation enhancement

Structural and thermoelectric characterization of individual single crystalline nanowires

Implementation of inductive proximity sensor using nanoporous anodic aluminum oxide layer

Nanocrystalline SiC metal-semiconductor-metal photodetector with ZnO nanorod arrays for high-temperature applications

Graphitization of n-type polycrystalline silicon carbide and its application for micro- supercapacitors

A graphene-based microelectrode for recording neural signals

Reducing stiction in Microelectromechanical Systems by nanometer-scale films grown by atomic layer deposition

Nanoelectromechanical switches based on diamond-on-diamond

“MEMSEye” for optical 3D tracking and imaging applications

Highly efficient LED lens biologically inspired from cuticle nanostructures of firefly light organs

Optial measurement of strain using scattering from nanoparticle pairs on elastomer

Microfabrication and packaging of a Rubidium vapor cell as a plasma light source for MEMS atomic clocks

On-chip optical power measurement by optical force

SPR photo diode detector using transportation phenomenon of photon and electron coupling

Development of a “Flip Glass Substrate” LED package technology for color bin yield and view angle enhancement

A microfluidic blood-clogging valve for on-chip blood analysis

Fully integraed droplet based point-of-care platform for molecular detection from crude biosamples

Isolation of tumor cells using a new microfluidic incubator with moving-wall structures

Towards quantification of biocompatibility: Monitoring ingrowth behavior of biomaterials in tissue with a microsensor implant

Disposable micro devices for clinical ICSI

A parylene-based flexible electroporation chip applicable for in vivo gene and siRNA delivery

Micro-aquatic-farm: On chip stimulation and evaluation system for microorganisms by magnetically driven microtools

Temperature dependence of vacuum encapsulated resonators for humidity measurement

Enhanced performance of a CMOS interdigital capacitive humidity sensor by graphene oxide

MEMS-based AC differential scanning calorimetry

Enhancement of sensitivity of coulometric detection usng a one-electrode system

Multimodal bio - image sensor for real - time proton and fluorescence imaging

Microfluidic surface-enhanced raman scattering sensors for online monitoring trace chemical mixing and reaction

Nanoparticle self-assembly based tripetaloid arrayed structures as surface-enhanced raman scattering substrates

Lightweight biocompatible physical sensors: Polymeric films “self-metallized” with organic molecular conductors

POSFET touch sensor with on-chip electronic module for signal conditioning

A novel MEMS tunable ionization sensor based on patterned freestanding Nickel nanowires and moving electrode

Control of MEMS on the edge of instability

High temperature compatible aluminum nitride resonating strain sensor

Fabrication and testing of an ionic electrospray propulsion system with a porous metal tip array

Electrical coupling suppressing for a microgyroscope using ascending frequency drive with 2-DOF PID controller

Analysis of acceleration sensitivity in MEMS tuning fork gyroscope

Ultrasensitive mass sensor using the out-of-phase vibration eigenstate of intercoupled dual-microcantilevers

Wireless passive sensing application using a cavity loaded evanescent mode half mode substrate integrated waveguide resonator

A monolithically integrated 3-axis thermal-convective accelerometer with a pneumatically curved thermopile-cantilever for Z-axis sensing

Differential pressure distribution measurement of a free-flying butterfly wing

Silicon carbide pressure sensor for high temperature and high pressure applications: Influence of substrate material on performance

Accelerometer using MOSFET with movable gate electrode: Electroplating thick nickel proof mass on flexible Parylene beam for enhancing sensitivity

Flexible force sensor measuring change in capacitance due to dielectric oil displacement out of domed polymer into surrounding channels

Non-degenerate parametric amplification and filtering in biomimetic hair flow sensors

Force sensor for measuring power transfer between the human body and the environment

Thin film encapsulated SiGe accelerometer for MEMS above IC integration

Photodiode with micro texture for improving sensitivity at large angle of incidence for particle sensors

Artificial hair cell with embedded piezoresistive force sensors

The sensitivity enhancement for the radiation sensor based on Film Bulk Acoustic-Wave Resonator

Aluminum nitride pMUT based on a flexurally-suspended membrane

A novel soi-mems “micro-swing” time-accelerometer operating in two time-based transduction modes for high sensitivity and extended range

A micromechanical ultrasonic distance sensor with >1 meter range

Flow rate insensitive thermal conductivity detector

Microfabricated electrospray ionization platform with 60 tips for high throughput mass spectrometric analyses

A micro gas chromatograph for high-speed determinations of explosive markers

Miniaturised gas chromatographic system with metal oxide gas sensor array for fast detection of off-flavors

Low-leakage gas sample-injection system for gas chromatography in harsh environments

Development of a novel micropreconcentrator for micro gas chromatography

Electrolytic charge inversion at programmable CMOS sensor interfaces

Cyclodextrin-based micro neurotransmitter sensor for selective catecholamine hormone detection

Dual photonic electrochemical lab on a chip for lactate detection in continuous flow mode

Highly sensitivity of potassium ion detection realized on fluorinated-HfO by fluorine implantation on EIS

Design of wireless sensor node based on a novel hybrid chemical sensor for heavy metal monitoring

Functionalization of nanoscaled 2 nm-thick ALD-HfO layer by rapid thermal annealing and CF plasma for LAPS $NH^{+}$ detection

A photovoltage-based integrated sensor for nephrotoxicity evaluation under drug stimulation

Theoretical and experimental investigation of ultrahigh sensitivity of wavelength-interrogated infrared surface plasmon resonance sensors

Multi-well structure for cell culture on the chemical imaging sensor

Flexible electrochemical imaging with “zoom-in” functionality by using a new type of light-addressable potentiometric sensor

Stiction-free poly-SiGe resonators for monolithic integration of biosensors with CMOS

Fluorescent hydrogel fibers for long-term in vivo glucose monitoring

Comparison of extracellular signals between gold and carbon nanotubes based microelectrode arrays

A high-throughput fully-automated microfluidic live cell array for combination drug treatment analysis of colorectal cancer cells

Microengineered iron and iron-oxide contrast agent particles for tunable multispectral magnetic resonance imaging

The effect of sequence length on DNA decorated CNT gas sensors

Temperature modulated excitation and phase sensitive detection to selectively image DNA sequences

A novel microneedle-based non- enzymatic glucose sensor for painless diabetes testing application

Cell-based surface acoustic wave resonant microsensor for biomolecular agent detection

A MEMS intraocular origami coil

A wireless and batteryless microsystem with implantable grid electrode/3-dimensional probe array for ECoG and extracellular neural recording on rat

Temperature sensing probe integrated with an SU-8 flexible ribbon cable for heart surgery application

A novel implantable saw sensor for blood pressure monitoring

A photoacoustic imager with infrared illumination through the CMUT chip

Post-operative wireless implants for monitoring, detection and treatment

A novel surface modification method to achieve low impedance neural microelectrode arrays

A cell electroporation and viability monitoring chip using a single channel with multiple electric field zones

Specific and label-free immunoglobulin G antibody detection using nano porous hydrogel photonic crystals

A submersible piezoresistive MEMS lateral force sensor for cellular biomechanics applications

Manipulation of electrical charge of proteins for sensitive biosensing using field-effect transistors

PCR on a PDMS-based microchip with integrated bubble removal

Tunable sensitivity and linearity of self-assembled carbon nanotube composite based pH biosensors using silica nanoparticles

Pattern generation of a microfluidic-based biosensor to detect C-reactive protein using the competitive protein adsorption

On-demand micro encapsulation utilizing on-chip synthesis of semi-permeable alginate-PLL capsules

A wireless love wave biosensor platform for simultaneous detections of two different biomolecules

Plant pathogen spores grow in microfluidic droplets: A high-throughput approach to antifungal drug screening

Precise sample positioning for multipoint immunoassay using nanofluidic preconcentrator

Polymer opto-mechanical transducer for abnormal cell contraction diagnostics

Chemical induced impedance spectroscopy for single cancer cell detection

A 3-D capillary-endothelium-mimetic microfluidic chip for studying the extravasation behaviour of neutrophils

A laterally resonating gravimetric sensor with uniform mass sensitivity and high linearity

Ultrasensitive dielectric filled Lamé mode biomass sensor

Nanoslit biosensor with single-pixel resolved kinetics capability: Finite element method and experimental results

Improving sensitivity of photonic crystal-based biosensors by a cavity arrangement

Label-free DNA detection based on silicon nanowires

Magnetically actuated cellular strain assessment tool; a study on the strain induced directional migration of human endothelial cells

A microfluidic sensor chip with renewable in-situ copper modified microelectrode for continuous monitoring of nitrate

A microfluidic device for high frequency characterization of fluids under high dc electric fields

Programable microfluidic processor with pumping and coulometric detecting functions

Micro titration device and its application to rice freshness measurement

Isotropic etching of 111 SCS for wafer-scale manufacturing of perfectly hemispherical silicon molds

Epoxy-less packaging methods for electrical contact to parylene-based flat flexible cables

Hermetic packaging of resonators with vertical feedthroughs using a glass-in-silicon reflow process

Integration of organic opto-electrowetting and poly(ethylene) glycol diacrylate (PEGDA) microfluidics for droplet manipulation

Bio-inspired 3D self-patterning of functional coatings for PDMS microfluidics

Polymer MEMS fabrication process for self-assembled millimeter-wave on-chip antennas

Suppression of wear in cyclically loaded polycrystalline silicon MEMS via a thin silicon carbide coating

Out-of-plane assembly of 3D neural probe arrays using a platform with SU-8-based thermal actuators

High performance $^{18}F^{-}$ concentration electrode for PET application by using interdigitated microstructure and pyrolyzed polymer/glassy carbon composite

Fabrication of high aspect ratio carbon nanotube-carbon composite microstructures based on silicon molding technique

Dielectrophoresis formation of ellipsoidal PDMS micro-lens array diagonally aligned on flexible membrane

UV laser dicing without failure caused by contamination and heat for thick anodically bonded silicon/glass MEMS wafers

Programmable micropatterning of nanofibers for functional tissue engineering

Rapid non-lithography based fabrication process and characterization of Parylene C bellows for applications in MEMS electrochemical actuators

Anodically-bondable LTCC substrates with novel nano-structured electrical interconnection for MEMS packaging

Simple and low-cost patterning of carbon nanotube on PDMS for flexible MEMS

Fabrication and testing of CVD diamond single-material MEMS resonators with piezoresistive detection

Novel isotropic and anisotropic etching of MEMS structures by controlling the dynamics of the etchant

A magnetostatic 2-axis MEMS scanner with I-section rib-reinforcement and slender permanent magnet patterns

The fabrication of 3D aspherical silicon microlenses using a shadow mask

Microfluidic channels fabricated using a lithography-free method

Investigation of temporary stiction in poly-SiGe micromirror arrays

Comprehensive dynamic and stability analysis of electrostatic Vibration Energy Harvester (E-VEH)

The minimum time estimation for initiating tumor-cell attachment

Integration and installation of on-site water-quality monitoring network based on model-based design technique

MEMS rate and rate-integrating gyroscope control with commercial software defined radio hardware

CMOS test circuit architecture for the extraction of fluid properties using interdigitated electrodes microsensors

Electrically driven CMOS-MEMS nonlinear parametric resonator design using a hierarchical MEMS circuit library

Direct pick and place of CNT bundles for strain sensing applications

Analytic model for perturbation analysis in coupled resonator system for electronic nose applications

Measurement of adhesion force at elevated temperatures in MEMS using thermal-structural actuation

Three-axis tactile display using PDMS pneumatic actuator for robot-assisted surgery

Batch fabricated bidirectional dielectric elastomer actuators

A drug-injection system with chemo-mechanical energy conversion for active feedback control of glucose concentration in a blood

Microfluidic actuators based on infrared-light responsive PNIPAAm hydrogel nanocomposite incorporating graphene-oxide

Ni-based microvalves for flow modulation: Toward active combustion control

Efficient electrostatic inchworm motors with simple control and high force density

Chemical switching of jellyfish-shaped micro robot consisting only of cardiomyocyte gel

Active CMOS-MEMS conductive probes and arrays for tunneling-based atomic-level surface imaging

Resonant stator actuation of gear coupled Ultrasonic Motors

All-electric peristaltic vacuum pump utilizing electromagnetic and hydraulic actuation with a highly flexible latex membrane

Lorentz force transduction for RF micromechanical filters

Reliable low-cost fabrication and characterization methods for micromechanical disk resonators

A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor

Electrothermally actuated RF MEMS capacitive switch with atomic layer deposited (ALD) dielectrics

Differential-input piezoresistively-sensed square-extensional mode resonator for parasitic feedthrough cancellation

Different stiction mechanisms in electrostatic MEMS devices: Nanoscale characterization based on adhesion and friction measurements

Millimeter-wave filter using novel micromachined substrate integrated waveguide structure with embedded silicon vias in BCB dilectrics

Ultra high frequency phononic crystal in silicon carbide

Independent tuning of quality factor and resonant frequency of torsional micro-resonators for timing and sensing applications

Tunable solid-body elastomeric diffractive lens

Nanoplasmonic photoconductive antenna for high power terahertz emission

Silicon/III–V material active layer heterointegrated vertical PIN waveguide photodiode by direct bonding

TiO freestanding thin film as evanescent waveguide sensor for biomedical application

Incorporation of polymer refractive microlens array for efficiency improvement of CuInS quantum dot-based hybrid photovoltaic cells

Switchable photonic crystals based on the photonic deformations of the azobenzene containing liquid crystal polymer

A compact projection system enabling topographical measurements for a miniaturized submersible explorer

MEMS mirrors based on curved concentric electrothermal actuators with very small lateral shift and tilt

A wireless paired emitter detector diode device as an optical sensor for Lab-on-a-disc applications

Electroluminescence from a freestanding integratable single ZNO dot

Integrated self-aligned tips for dispersion tuning in a photonic crystal micro-cavity

Dual-band MEMS Fabry-Pérot filter with two movable reflectors for mid- and long-wave infrared microspectrometers

MEMS scanner based handheld fluorescent hyperspectral imaging system

A high-speed electrostatic double-layered vibratory grating scanner with very high optical resolution

Design and fabrication of 2D fast electrothermal micromirrors with large scan range and small center shift

Polymer-dispersed liquid crystals light shutter driven by surface acoustic wave

Ultra-compact electro-thermally tunable photonic crystal prism for on-chip optical router application

Ambipolar Si nanowire field effect transistors for low current and temperature sensing

Carbon nanotube based multi-spectrum infrared detector array

Nanogap-controllable self-assembly of gold nanoparticles using nanotrench template

Axially stretched nano-thick piezoresistive silicon clamped-beams to sense specific-reaction-induced double-side surface-stress with much higher sensitivity than cantilevers

Design, fabrication and Helium Ion Microscope patterning of suspended nanomechanical graphene structures for NEMS applications

Effect of electron-beam irradiation on electrical characterization of nanowires in scanning electron microscope

Nanoprobe electrodes cut by physical stretch of Parylene-insulated carbon nanotube bridges

Direct growth of single walled carbon nanotubes on paper

An ultra-sensitive nanocomposite pressure sensor patterned in a PDMS diaphragm

Large-surface-area 3D self-assembled nano-porous structure for high-sensitivity gas-sensing

Multi-spacer technique for low-voltage, high-aspect-ratio lateral electrostatic actuators

Dual sidewall lateral nanoelectromechanical relays with beam isolation

CMOS-MEMS atomic force microscope

Silicon carbide (SiC) membrane nanomechanical resonators with multiple vibrational modes

A novel assembly method for micro direct methanol fuel cells using multi-layer bonding technique

Piezoelectric PDMS films for power MEMS

Aging characteristics of electret used in a vibration-based electrostatic induction energy harvester

Vibration-driven MEMS energy harvester with vacuum UV-charged vertical electrets

Electret based energy harvester using a shared si electrode

Increased-bandwidth, meandering vibration energy harvester

Fabrication of highly dielectric nano-BaTiO/epoxy-resin composite plate having trenches by mold casting and its application to capacitive energy harvesting

Efficient energy harvesting from human motion using wearable piezoelectric shell structures

A vibration-based electromagnetic energy harvester system with highly efficient interface electronics

Electrostatically-driven active space radiator using near-field thermal radiation

Effect of illlumination on thermionic emission from microfabricated silicon carbide structures

“Bottom-up” three-dimensional metamaterials at terahertz frequencies

3-D microcoils as a metamaterial with electric and magnetic response

A micromachined optical delay line by switchable metamaterials

All-optical programmable photonic integrated circuit: An optical analogy to electronic FPGA

Acoustic speaker based on high-efficiency broadband nano-pillar photonic crystal Opto-thermo-mechanical MEMS excitation

Reflectance-based TiO photonic crystal sensors

NiFe-AAO nanocomposite for performance enhancement of on-chip spiral inductors

Sputtered molybdenum as conductive material for high-temperature microhotplates

Piezoresistive biocompatible membranes for flexible pressure sensors

Creep of parylene-C film

Electrolytic hydrogenation technique: New approach for the modification of Ti-film mechanical properties and MEMS applications

Negative-photoresist mechanical property for nano-filtration membrane embedded in microfluidics

Oxygen plasma functionalized PEDOT/PSS-SWCNTs thin film deposited by electrophoresis for gas sensing

‘Pickup and place’ integration method of bridging carbon nanotubes by stamping transfer

Programmable transformation of vertically aligned carbon nanotubes into 3D microstructures

Densely packed carbon nanotube forest on silicon substrate for MEMS supercapacitor applications

Autonomous passive light tracking utilizing single-wall carbon nanotube enhanced opto-thermo-mechanical elastomer actuators

Self-aligned double-gate suspended-body carbon nanotube field-effect-transistors for RF applications

Ultrasensitive pressure sensor based on gate- all-around nanowire fet

Highly sensitive bilayer structured graphene sensor

Magnetophoretic label-free cell separation using paramagnetic solution

Amplification of chemotactic responses of motile bacterial cells for characterizing preferential chemotaxis toward carbon sources

A glucose-responsive insulin delivery micro device embedded with nanohydrogel particles as “smart valves”

Si nano-pillars for measuring traction force exerted by filopodia

Gold nanoparticle-based redox signal enhancement towards the detection of single bacterium

Biofuel cells with trehalose leading to an insect-implanted power source

Separation of caenorhabditis elegans by electrotaxis in a microdevice

Elastomeric capacitive sensors

A design of longitudinally-divided balloon structure in PDMS pneumatic balloon actuator based on fem simulations

One step integration of gold coated sensors with OSTE polymer cartridges by low temperature dry bonding

Single-step fabrication of organic nanofibrous membrane for piezoelectric vibration sensor

Mechanical regulation of collective cell behavior via microtopographic substrates

Battery-free wireless touch driven transmitter with on-chip antennas for wireless sensor systems

Novel frequency agile electromagnetic decoupling MEMS device

Inductively coupled wirebonded microcoils for wireless on-chip NMR

On-chip RF inductors with magnetic nano particles medium

Multi-DOF inertial MEMS: From gaming to dead reckoning

Sub-degree-per-hour silicon MEMS rate sensor with 1 million Q-factor

Single-crystal-silicon vibratory cylinderical rate integrating gyroscope (CING)

Experimental evaluation of alternative drive-mode control electronics developed for high-performance MEMS gyroscopes

A mode-matched 0.9 MHZ single proof-mass dual-axis gyroscope

Retinal implants to restore vision in blind people

Delivery of an anti-cancer drug from a magnetically controlled MEMS device show cytotoxicity in PC3 and HUVEC cells

Capsule microrobot for targeting in medical diagnostic treatment

Electrochemically-based dose measurement for closed-loop drug delivery applications

A medical tactile sensor for measuring tissue hardness in robotic surgical tools

A MEMS micro-reed switch designed for portable applications

Micromechanical magnetometers based on clamped-clamped high-Q nonlinear resonators

Novel coupling concept for five-contact vertical hall devices

Localized strain sensing using high spatial resolution, highly-sensitive MEMS resonant strain gauges for failure prevention

Detection system of incident slippage and friction coefficient based on a flexible tactile sensor with structural electrodes

IR thermocycler for centrifugal microfluidic platform with direct on-disk wireless temperature measurement system

Contour-mode film bulk acoustic resonator for monitoring blood coagulation in real-time

Improved reliability of SiC pressure sensors for long term high temperature applications

Very high temperature (800°C) ohmic contact of Au/NiSi on n-type polycrystalline silicon carbide aged in air

Impact of encapsulation materials on the performance of silicon-based solid state high pressure sensors with surface trenches

An SOI thermal-diffusivity-based temperature sensor with ±0.6°C (3Σ) untrimmed inaccuracy from −70°C to 170°C

Design evaluation of shock induced failure mechanisms of MEMS by correlation of numerical and experimental results

EFM study of the influence of humidity on charge injection and charge relaxation in silicon nitride used in electrostatically actuated MEMS

Time predictive model of charge accumulation in bulk PECVD dielectric materials used for electrostatic RF MEMS switches

Lens scanning based MEMS catheter for forward endoscopic optical coherence tomography

Frontside-only processing of 2-D MEMS scanner for miniature dual-axis confocal microendoscopes

Development of the micro-mirror with large scaning angle using FE-based metallic glass thin film

Interferometric modulators using mechanically coupled mirror actuators for color reproduction

Opto-acoustic oscillator using silicon MEMS optical modulator

Electrostatic torsional vertical flaps for reflective MEMS display

Monolithic integration of NEMS tunable color filter and LSI driver circuits

High pressure EWOD digital microfluidics

Enhanced micro-droplet splitting, concentration, sensing and ejection by integrating ElectroWetting-On-Dielectrics and Surface Acoustic Wave technologies

On-chip synthesis of silica nanoparticle assemblies with controlled shape and size

Stand-alone micro fluidic system using partly disposable PDMS microwell array for high throughput cell analysis

On-chip integration of eight directional droplet ejectors for inking a spot with eight droplets without ejector movement

Fully integrated dilution series generation on a laboratory centrifuge

Leukocyte 5-part differential count using a microfluidic cytometer

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)

Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers

Control of MEMS on the edge of instability

Content Provider	IEEE Xplore Digital Library
Author	Burgner, C.B. Snyders, W.S. Turner, K.L.
Copyright Year	2011
Description	Author affiliation: University of California, Santa Barbara, USA (Burgner, C.B.; Snyders, W.S.; Turner, K.L.)
Abstract	This paper investigates a new method for tracking parameters at which dynamic bifurcations occur in MEMS based on state statistics of a resonator. Experimental results show that observed changes in phase and amplitude precede a sub-critical pitchfork bifurcation. Feedback control, based on the statistics of the phase, is then employed to stabilize a device on the edge of instability. Sensitivity to changes in device parameters is explored and initial results show high sensitivity is obtained for low vibration amplitudes. Furthermore, experimental results on the same device using an older method of bifurcation sensing show acquisition rate improvement by over three orders of magnitude with the new method.
Starting Page	1990
Ending Page	1993
File Size	2102463
Page Count	4
File Format	PDF
ISBN	9781457701573
e-ISBN	9781457701566
DOI	10.1109/TRANSDUCERS.2011.5969197
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-06-05
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Bifurcation Sensors Noise Voltage control Vibrations Resonant frequency Frequency control feedback control mass sensing
Content Type	Text
Resource Type	Article

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