NDLI: Dual-band MEMS Fabry-Pérot filter with two movable reflectors for mid- and long-wave infrared microspectrometers

Content Provider	IEEE Xplore Digital Library
Author	Meinig, M. Ebermann, M. Neumann, N. Kurth, S. Hiller, K. Gessner, T.
Copyright Year	2011
Description	Author affiliation: InfraTec GmbH, Dresden, Germany (Ebermann, M.; Neumann, N.) \|\| Chemnitz University of Technology, Germany (Hiller, K.) \|\| Fraunhofer ENAS, Chemnitz, Germany (Meinig, M.; Kurth, S.; Gessner, T.)
Abstract	A tunable dual-band MEMS Fabry-Pérot filter for simultaneous use of the spectral ranges from 8 µm to 10.5 µm and from 4 µm to 5 µm is reported. A peak transmittance of at least 75 % and a FWHM of less than 200 nm were measured. The maximum control voltage is 41 V. Two movable reflector carriers compensate the influence of gravitational force on the central wavelength. The device can withstand mechanical shocks according to Mil-Std-883G, method 2002.4, test condition B. The filter is integrated in a tiny, robust and fast microspectrometer module with the size of a TO-8 housing.
Starting Page	2538
Ending Page	2541
File Size	1520123
Page Count	4
File Format	PDF
ISBN	9781457701573
e-ISBN	9781457701566
DOI	10.1109/TRANSDUCERS.2011.5969764
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-06-05
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical filters Band pass filters Mirrors Optical reflection Micromechanical devices Dual band Dielectrics microspectrometer Infrared filter Fabry-Pérot interferometer dual-band MWIR LWIR
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
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9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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