NDLI: Gold membranes with large arrays of sub-μm holes fabricated by wafer-scale Nanosphere Lithography

Content Provider	IEEE Xplore Digital Library
Author	Klein, M.J.K. Eckert, R. Guillaumee, M. Dunbar, L.A. Heinzelmann, H. Brugger, J. Pugin, R.
Copyright Year	2011
Description	Author affiliation: Microsystems Laboratory LMIS1, EPFL-STI-IMT, Lausanne, SWITZERLAND (Brugger, J.) \|\| Nanotechnology and Life Sciences, CSEM S.A., Neuchâtel, SWITZERLAND (Klein, M.J.K.; Eckert, R.; Guillaumee, M.; Dunbar, L.A.; Heinzelmann, H.; Pugin, R.)
Abstract	Gold membranes with large arrays of sub-μm holes were fabricated and optically characterized. The fabrication is a combination of a bottom-up, self-assembly based patterning technique, Nanosphere Lithography (NSL), and standard microfabrication. This was achieved by 1) up-scaling of the deposition of close-packed bead monolayers to 4″ wafer substrates, 2) controlled bead size reduction, 3) etching of high aspect-ratio Si pillar arrays, 4) using the pillar arrays as a lift-off template, and 5) releasing the membranes by dry-etching. In this way, millimeter-size, 200 nm thick gold membranes with dense, short-range ordered hole arrays were fabricated. The array periodicity was either 428 nm or 535 nm, depending on the initial bead size. The hole diameter was tuned in the range of 150 nm to 250 nm. Optical transmission spectroscopy showed surface plasmon mediated extraordinary optical transmission (EOT) with an enhancement factor greater than two.
Starting Page	610
Ending Page	613
File Size	1994402
Page Count	4
File Format	PDF
ISBN	9781457701573
e-ISBN	9781457701566
DOI	10.1109/TRANSDUCERS.2011.5969777
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-06-05
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Gold Optical device fabrication Optical variables control Optical refraction Optical filters extraordinary optical transmission Nanosphere Lithography gold membranes hole arrays sub-wavelength holes surface plasmons
Content Type	Text
Resource Type	Article

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