NDLI: A surface-micromachined MEMS acoustic sensor with 0.8 µm CMOS impedance transducer

Content Provider	IEEE Xplore Digital Library
Author	Jaewoo Lee Je, C.H. Yang, W.S. Yang, Y.S. Jongdae Kim
Copyright Year	2010
Description	Author affiliation: CCMRL, Electronics and Telecommunications Research Institute, 161 Gajeong-dong Yuseong-gu, Daejeon, 305-700, Republic of Korea (Jaewoo Lee; Je, C.H.; Yang, W.S.; Yang, Y.S.; Jongdae Kim)
Abstract	A surface-micromachined capacitive-type micro-electro-mechanical system (MEMS) acoustic sensor with 0.8 µm CMOS impedance transducer is presented. This sensor chip is composed of a surface-micromachined MEMS microphone with X-shape bottom electrode anchors and a simple monolithic integrated impedance transducer based on 0.8 µm CMOS process (1 poly-2 metals), where Metal 2 in the CMOS process is also used as a bottom electrode for a sensor part. The total chip area is 0.8 mm × 0.9 mm. The Si MEMS acoustic sensor proposed in this paper has a diameter of 500 µm and a back chamber depth of 20 µm. It shows a zero-bias capacitance of 1.25 pF at 1 kHz and a pull down voltage of 33.4 V, and an open-circuit sensitivity of 0.53 mV/Pa on a bias of 9 V. In addition, the impedance transducer transfers a high output impedance to a low input impedance with a 9.5 dB gain at an input condition of 5 mV at 1 kHz.
Starting Page	1779
Ending Page	1782
File Size	4403061
Page Count	4
File Format	PDF
ISBN	9781424481705
ISSN	19300395
e-ISBN	9781424481699
e-ISBN	9781424481682
DOI	10.1109/ICSENS.2010.5689970
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-11-01
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Biosensors Electrodes Biochemistry Instruments Current measurement Biomembranes Electric potential
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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