NDLI: Remote excitation and readout of a high Q silicon resonator

Content Provider	IEEE Xplore Digital Library
Author	Vernooy, D. Knobloch, A. Ahmad, F. Sexton, D.
Copyright Year	2010
Description	Author affiliation: General Electric Global Research, Niskayuna, NY 12309, USA (Vernooy, D.; Knobloch, A.; Ahmad, F.; Sexton, D.)
Abstract	This paper presents the first published report of a totally passively driven actuation and readout of an electromechanical resonator using inductive coupling. The goal of this work is to remotely excite and read a MEMS comb drive resonator with a focus on low power operation while simultaneously maximizing standoff distance without the use of active electronics at the sensor location. Initial measurements focused on the determining the relationship of the received signal level with the drive parameters. Reading the resonator through integrated piezoresistors, the drive response showed the expected dependence of both the RF power and AM modulation depth and the coil separation matched a simple model of a 6 cm coil radius and $B^{4}$ dependence. Measurements of an entirely wireless (read and driven) resonator were made to explore the standoff capability with a practical limit of ∼15 dBm RF power to both the drive and receive systems. A standoff of 9 cm was demonstrated limited by power input to the device. The effect of read and drive coil position was also studied.
Starting Page	1108
Ending Page	1112
File Size	1951665
Page Count	5
File Format	PDF
ISBN	9781424481705
ISSN	19300395
e-ISBN	9781424481699
e-ISBN	9781424481682
DOI	10.1109/ICSENS.2010.5690815
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-11-01
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Coils Resonant frequency Radio frequency Wireless communication Wireless sensor networks Oscillators Silicon
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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