NDLI: Electromechanical modeling and characterization of the electrical breakdown for the capacitive microarrayed ultrasonic transducers

Content Provider	IEEE Xplore Digital Library
Author	Te-I Chiu Shi-Bing Luo Tsai-Chu Hsiao
Copyright Year	2010
Description	Author affiliation: Electronics and Optoelectronics Research Laboratory, Industrial Technology Research Institute, ITRI, Hsin-Chu, Taiwan, R.O.C. (Te-I Chiu; Shi-Bing Luo; Tsai-Chu Hsiao)
Abstract	This paper presents two numerical evaluation schemes to simulate the dielectric breakdown phenomena for the capacitive micro-arrayed ultrasonic transducers (CMUT). The performance of dielectric strength was investigated using a commercial finite element method (FEM) software package of ANSYS. The electro-mechanical model was established using the ANSYS parametric design language (APDL) technique. A built-in Multiphysics solver of ANSYS was employed for the simulation of the electrostatic-structural coupled-field problems. Relationships of the applied DC bias voltage versus the membrane deflection, collapse voltage, capacitance, and layer-wised electric field distribution are obtained. For a verification purpose, a simple semi-analytical approach based on the classical thin plate theory and parallel-plate capacitor principle was also proposed. Reasonable matching results and less computation efforts are obtained. The proposed approach provides another efficient numerical tool for estimating the dielectric breakdown possibility of the CMUT.
Starting Page	188
Ending Page	192
File Size	1433568
Page Count	5
File Format	PDF
ISBN	9781424481705
ISSN	19300395
e-ISBN	9781424481699
e-ISBN	9781424481682
DOI	10.1109/ICSENS.2010.5690401
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-11-01
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrodes Atmospheric modeling Artificial intelligence Computational modeling Dielectrics Numerical models Finite element methods
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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