NDLI: Aerosol synthesis of chemoresistive gas sensors: Materials, structures and performances

Content Provider	IEEE Xplore Digital Library
Author	Tricoli, A. Righettoni, M. Pratsinis, S.E.
Copyright Year	2010
Description	Author affiliation: Particle Technology Laboratory, Department of Mechanical and Process Engineering, ETH Zurich, Switzerland (Tricoli, A.; Righettoni, M.; Pratsinis, S.E.)
Abstract	The sensing performance of nanoparticle films obtained by aerosol synthesis is investigated as a function of material composition (e.g. SnO, TiO, WO), film morphology and layout. It is shown that highly porous (98%) films are obtained by direct deposition from the gas phase. Utilization of a flame spray pyrolysis (FSP) reactor as particle source was found to be a flexible alternative for the synthesis of single and multi oxides at high production rates. More in detail, low content Si-doping of SnO or WO FSP-made nanoparticles drastically increased their response to ethanol and acetone, respectively. This was attributed to the high thermal stability of these nanocomposites at the elevated operation temperatures of metal oxide gas sensors. However, mechanical stabilization of these films was required to avoid their disintegration. Sufficient mechanical stabilization was obtained by rapid in-situ annealing with an impinging particle free flame leading to highly sensitive metal oxide-based gas sensors. In conclusion, aerosol synthesis of chemoresistive gas sensors is critically reviewed focusing on the opportunities offered by novel flame methods, such as FSP, while assessing some of its current limitations.
Starting Page	1248
Ending Page	1253
File Size	1115301
Page Count	6
File Format	PDF
ISBN	9781424481705
ISSN	19300395
e-ISBN	9781424481699
e-ISBN	9781424481682
DOI	10.1109/ICSENS.2010.5690608
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-11-01
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Films Metals Thermal stability Aerosols Fires Sensors Substrates
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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