NDLI: An ultrasonic rangefinder based on an AlN piezoelectric micromachined ultrasound transducer

Content Provider	IEEE Xplore Digital Library
Author	Przybyla, R. Izyumin, I. Kline, M. Boser, B. Shelton, S.
Copyright Year	2010
Description	Author affiliation: Berkeley Sensor and Actuator Center, University of California, 94720, USA (Przybyla, R.; Izyumin, I.; Kline, M.; Boser, B.) \|\| Berkeley Sensor and Actuator Center, University of California, Davis, 95616, USA (Shelton, S.)
Abstract	An ultrasonic rangefinder has a working range of 30mm to 450mm and operates at a 375 Hz maximum sampling rate. The worst-case systematic error less than 1.1 mm. The rms noise is proportional to the square of the distance and equals 1.3mm at the maximum range. The range measurement principle is based on pulse-echo time of flight measurement using a single transducer for transmit and receive consisting of a piezoelectric AlN membrane with 400 µm diameter which was fabricated using a low-temperature process compatible with processed CMOS wafers. All circuits are low voltage, enabling integration in standard low voltage circuit technology.
Starting Page	2417
Ending Page	2421
File Size	1796478
Page Count	5
File Format	PDF
ISBN	9781424481705
ISSN	19300395
e-ISBN	9781424481699
e-ISBN	9781424481682
DOI	10.1109/ICSENS.2010.5690777
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-11-01
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Acoustics Transducers Biomembranes Noise Ultrasonic imaging Attenuation Atmospheric modeling
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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