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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Zhen-hua Ye Hai-gang Yang Tao Yin Yu Wang Qi-song Wu Chong Zhang Fei Liu |
| Copyright Year | 2010 |
| Description | Author affiliation: Institute of Electronics, CAS, Beijing, China (Zhen-hua Ye; Hai-gang Yang; Tao Yin; Yu Wang; Qi-song Wu; Chong Zhang; Fei Liu) |
| Abstract | This paper presents a closed-loop switched-capacitor interface for high-quality bulk micro-mechanical accelerometer. Analogue force feedback is realized to establish an electromechanical closed-loop so as to improve the dynamic range. The feedback accuracy is guaranteed by applying bottom-plate-sampling structure in the feedback controller. A proportional derivative controller is introduced to compensate the instability derived from the high-quality accelerometer, while offset cancellation structure is inserted to further improve the dynamic range. The chip measures $2.5×2.5mm^{2}$ in Chartered 0.18µm CMOS process. Simulation results show that the whole accelerometer system offers ±1.3g input range with 0.25% non-linearity from a single 6V supply, as well as a good degree of robustness. |
| Starting Page | 249 |
| Ending Page | 252 |
| File Size | 888337 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424481705 |
| ISSN | 19300395 |
| e-ISBN | 9781424481699 |
| e-ISBN | 9781424481682 |
| DOI | 10.1109/ICSENS.2010.5689843 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2010-11-01 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Accelerometers Sensors Force feedback Q factor Mathematical model Capacitors Acceleration |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electrical and Electronic Engineering |
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