NDLI: A novel 3D CMOS micro-fluxgate magnetic sensor for low magnetic field detection

Content Provider	IEEE Xplore Digital Library
Author	Wen-Sheng Huang Chih-Cheng Lu Jen-Tzong Jeng
Copyright Year	2010
Description	Author affiliation: Institute of Mechatronic Engineering, National Taipei University of Technology, Taiwan, R.O.C. (Wen-Sheng Huang; Chih-Cheng Lu) \|\| Department of Mechanical Engineering, National Kaohsiung University of Applied Sciences, Taiwan, R.O.C. (Jen-Tzong Jeng)
Abstract	A novel dual-core 3D CMOS fluxgate magnetic sensor, including device design, manufacturing process, frequency characterizations and measurement of earth magnetic field, is reported in this article. Our design concept that differs from recently developed planar CMOS fluxgate sensors realizes the implementation of conventional wire-winded fluxgate sensors on a silicon wafer and features miniature dimensions and simple post-CMOS process. The fabricated 3D fluxgate is implemented in a 2.5 mm × 2.5 mm chip and comprises two excitation solenoids enclosing the ferromagnetic cores by using wire-bonding technique, which enables a sufficient excitation field to saturate the magnetic cores. Experimental results revealed that the novel device is able to output a linear B-V diagram in the neighborhood of zero-magnetism point regardless of in- or quadrature-phases while operated at 5 V of excitation voltage and 25 kHz of excitation frequency. In addition, the noise analysis indicated the micro-fluxgate has low noise decreasing with the increasing excitation frequency, e.g., 17.03 nT/√Hz at 1 Hz and 1.92 nT/√Hz at 10 kHz. In conclusions, our proposed device not only has enhanced field-to-voltage transfer coefficient (4.7 V/T) and excellent linear B-V characterization, but also is volume-miniature and CMOS-compatible when compared with conventional fluxgate and planar fluxgate sensors.
Starting Page	1791
Ending Page	1794
File Size	750598
Page Count	4
File Format	PDF
ISBN	9781424481705
ISSN	19300395
e-ISBN	9781424481699
e-ISBN	9781424481682
DOI	10.1109/ICSENS.2010.5689981
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-11-01
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Magnetic sensors Magnetic cores Coils Magnetic fields Three dimensional displays CMOS integrated circuits
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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