NDLI: Design of polymer tube embedded in-plane micropump

Content Provider	IEEE Xplore Digital Library
Author	Kole, A. Jeongsik Sin Woo Ho Lee Popa, D. Agonafer, D. Stephanou, H.
Copyright Year	2006
Description	Author affiliation: Autom. & Robotics Res. Inst., Texas Univ., Fort Worth, TX (Kole, A.; Jeongsik Sin; Woo Ho Lee; Popa, D.; Agonafer, D.; Stephanou, H.)
Abstract	This paper presents a design of micropump, which is an assembly of silicon micromachined actuator with a polymer tube diaphragm. The pump actuation principle is electrothermal expansion of a silicon V-beam structure, and its expansion is amplified through a lever structure to create greater diaphragm stroke as presented in J. Sin et al. (2004). Diffuser/nozzle structures are applied to direct the flow from an inlet to outlet port while the actuator provides pumping motion. Deep RIE (reactive ion etching) process is used to fabricate the pump structure on a SOI (silicon on insulator) wafer. Polymer tube is fabricated from Parylene conformal deposition process using a DRIE silicon mold and the tube structure is assembled with the silicon actuator module. FEM analysis is performed on the tube structure and the simulation results show that the stroke of the tube diaphragm becomes much smaller than original actuator stroke, mainly due to the constrained tube geometry in silicon structure. When the tube stroke is combined with the diffusion/nozzle flow mechanism, the resultant flow rate of the pump was about 160nl/min, which will be suitable for low flow rate and high precision applications. Further study is on going to build prototype of the pump
Starting Page	6
Ending Page	1329
File Size	614433
Page Count	1324
File Format	PDF
ISBN	0780395247
ISSN	10879870
DOI	10.1109/ITHERM.2006.1645498
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-05-30
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Polymers Micropumps Actuators Assembly Silicon on insulator technology Electrothermal effects Silicon compounds Etching Performance analysis Solid modeling
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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