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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Mi-Hyun Kang Chang-Sin Park Bo Young Choi Dong-Weon Lee |
| Copyright Year | 2009 |
| Description | Author affiliation: MEMS & Nanotechnology Laboratory, School of Mechanical Systems Engineering, Chonnam National Universit, Gwangju, Korea (Bo Young Choi; Dong-Weon Lee) || MEMS & Nanotechnology Laboratory, Graduate school of Mechanical Engineering, Chonnam National University, Gwangju, Korea (Mi-Hyun Kang; Chang-Sin Park) |
| Abstract | We introduce a novel fabrication method of a tungsten tip for STM applications. It uses a gradual meniscus descending phenomena caused by the thanks of a Teflon structure with the hydrophobicity. The fabricated tungsten tips with high aspect ratio have curvature radius of 20nm or even less. Good reproducibility is experimentally demonstrated by the use of the new etching system. Finally, field emission behaviors of the fabricated tungsten tips are characterized in a high vacuum condition. |
| Starting Page | 1069 |
| Ending Page | 1072 |
| File Size | 6472182 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424446292 |
| DOI | 10.1109/NEMS.2009.5068758 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-01-05 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Fabrication Shape Printing USA Councils DNA Genomics Bioinformatics Biosensors Probes Cells (biology) Hydrophobicity Scanning tunneling microscope Tungsten tip Meniscus Teflon |
| Content Type | Text |
| Resource Type | Article |
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