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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Kraft, M. Ding, H. |
| Copyright Year | 2009 |
| Description | Author affiliation: Institute of Microelectronics, Peking University, China (Ding, H.) || School of Electronics and Computer Science, Southampton University, UK (Kraft, M.) |
| Abstract | In this paper a review is presented about recent developments of using sigma-delta modulator (SDM) control systems for micromachined, capacitive vibratory rate MEMS gyroscopes. The design choices, their benefits and disadvantages are briefly discussed. As the most promising control system, a higher order, band-pass SDM is identified since it achieves high quantization noise shaping at a relatively low sampling frequency, in addition to the normal closed loop, force feedback control advantages such as improved bandwidth, linearity and dynamic range. Previous work applied this type of control system to gyroscopes with a relatively small proof mass. Here, results are presented applying the approach to a comparatively large, bulk-micromachined gyroscope sensing element, which has the potential to result in a high performance sensor. System level simulations are presented illustrating the benefits of the approach. |
| Starting Page | 41 |
| Ending Page | 46 |
| File Size | 5025201 |
| Page Count | 6 |
| File Format | |
| ISBN | 9781424446292 |
| DOI | 10.1109/NEMS.2009.5068523 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-01-05 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Delta-sigma modulation Control systems Micromechanical devices Gyroscopes Linear feedback control systems Force control Shape control Quantization Noise shaping Sampling methods sigma-delta modulator band-pass control system gyroscope |
| Content Type | Text |
| Resource Type | Article |
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