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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Dong-Ming Fang Hai-Xia Zhang Xiao-Lin Zhao |
| Copyright Year | 2009 |
| Description | Author affiliation: Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, China (Xiao-Lin Zhao) || Institute of Microelectronics, Peking University, Beijing, China (Dong-Ming Fang; Hai-Xia Zhang) |
| Abstract | For electrostatically actuated parallel-plate tunable Microelectromechanical System (MEMS) capacitors in traditional theory, pull-in occurs when the deflection of the movable plate is one-third of the original air gap. In this paper, we fabricated the parallel-plate tunable MEMS capacitors and used WYKO NT1100 optical surface profiler to measure the displacement related with deformation. The results show that only the center of the movable plate nearly fully reached their maximum displacement when pull-in effect occurs, that is, the electrostatic force is nonlinear. The theoretical deviations of the capacitance and pull-in voltage in traditional theory and in this work are more than 2.6% and 1.3%. |
| Starting Page | 25 |
| Ending Page | 28 |
| File Size | 4517994 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424446292 |
| DOI | 10.1109/NEMS.2009.5068519 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-01-05 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Micromechanical devices Capacitors Voltage Resists Capacitance Tunable circuits and devices Nickel Microelectromechanical systems Nonlinear optics Displacement measurement deformation tunable capacitor Microelectromechanical System pull-in voltage |
| Content Type | Text |
| Resource Type | Article |
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