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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Henan Ni Liangcai Wu Zhitang Song Chun Hui |
| Copyright Year | 2009 |
| Description | Author affiliation: Research Institute of Micro/Nano Science and Technology, Shanghai Jiaotong University, 200030, China (Henan Ni) || Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 200050, China (Liangcai Wu; Zhitang Song) || College of Life Science Biotechnology, Shanghai Jiaotong University, 200030, China (Chun Hui) |
| Abstract | MOS capacitor structure with double-layer heterogeneous nanocrystals consisting of metal and semiconductor embedded in gate oxide for the applications of nonvolatile memory have been fabricated and characterized. By combining the self-assembled Ni nanocrystals and vacuum electron-beam co-evaporated Si nanocrystals in SiO matrix, the MOS capacitor with double-layer heterogeneous nanocrystals can appear large charge storage capacity and improved retention characteristics compared to that with single-layer nanocrystals. The metal nanocrystals at the lower stack enable the direct tunneling mechanism to obtain larger flat voltage shift, while the Si nanocrystals at the upper stack works as an additional charge trap layer to enhance the retention time and the flat voltage shift. |
| Starting Page | 672 |
| Ending Page | 675 |
| File Size | 4761108 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424446292 |
| DOI | 10.1109/NEMS.2009.5068669 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-01-05 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Nanocrystals Tunneling MOS capacitors Voltage Scanning electron microscopy Potential well Rapid thermal annealing Monitoring Transmission electron microscopy Size control MOS capacitor Nonvolatile memory Nanocrystal memory |
| Content Type | Text |
| Resource Type | Article |
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