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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Lidong Du Zhan Zhao Cheng Pang Zhen Fang Yonghong Liu Youjun Han |
| Copyright Year | 2009 |
| Description | Author affiliation: State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, China (Lidong Du; Zhan Zhao; Cheng Pang; Zhen Fang; Yonghong Liu) || Institute of Meteorology, PLA University of Science & Technology, Nanjing 211101, China (Youjun Han) |
| Abstract | A wind velocity sensor using the torque of cantilever to measure the velocity of wind is presented in this paper. It consists of a thin silicon plate and two short cantilevers which connect with the plate and silicon substrate and will bend when wind blow to the plate. The wind velocity is obtained by measuring the strain caused by the deflection of the cantilevers. The designed sensor was simulated with ANSYS software using the model solid92 and analyzed with fluid mechanics principle and material mechanics principle. It is fabricated using MEMS surface and body micromachining process. By testing the designed sensor within small wind tunnel the results of calculation and simulation are validated. When the input voltage is 0.5V we obtain a sensor capable of high sensitivity 60µv/(m/s) at the high wind velocity. |
| Starting Page | 1 |
| Ending Page | 4 |
| File Size | 4046852 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424446292 |
| DOI | 10.1109/NEMS.2009.5068513 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-01-05 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Solid state circuits Silicon Wind speed Velocity measurement Strain measurement Solid modeling Torque measurement Analytical models Micromechanical devices Micromachining Platinum resistance Wind velocity sensor Drag force Silicon plate |
| Content Type | Text |
| Resource Type | Article |
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