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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Yung-Chun Lee Pin-Chang Chen Hung-Yi Lin |
| Copyright Year | 2009 |
| Description | Author affiliation: Mechanical and System Research Laboratory, ITRI, Hsinchu, Taiwan (Hung-Yi Lin) || Department of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan (Yung-Chun Lee; Pin-Chang Chen) |
| Abstract | This paper presents a new method for fabricating a seamless roller mold with micrometer-scaled features based on laser direct writing approach. In the process, a glass roller is first coated with a metal thin film. A high-energy pulsed laser directly machines the metal thin film and thus defines the pattern on the roller's surface. Subsequent wet etching on the patterned roller using the residual metal layer as the etching mask completes the fabrication of seamless glass roller molds. Digital image processing techniques are incorporated into the laser machining processes so that complicated patterns can be successfully transferred. Experimental results demonstrate a smallest feature size down to 20 µm for both linear grating and dot-array patterns. The advantages of this method are: (1). seamless patterns on roller mold, (2). good machining accuracy, (3). easiness in achieving complicated patterns, and (4). low cost. This method opens up many new directions and possibilities in the applications of roller-imprinting for continuous, large-area, and low-cost fabrication of micro-structures. |
| Starting Page | 767 |
| Ending Page | 770 |
| File Size | 13445095 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424446292 |
| DOI | 10.1109/NEMS.2009.5068691 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-01-05 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Optical device fabrication Writing Glass Transistors Wet etching Machining Optical pulses Surface emitting lasers Digital images Gratings micro-structures seamless roller mold laser direct writing rollerimprinting |
| Content Type | Text |
| Resource Type | Article |
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