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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Gaoyin Ma Wenyuan Chen Qijun Xiao Weiping Zhang Feng Cui Kai Li |
| Copyright Year | 2009 |
| Description | Author affiliation: National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, Research Institute of Micro/Nanometer Science and Technology, Shanghai Jiaotong University, 200240, China (Gaoyin Ma; Wenyuan Chen; Qijun Xiao; Weiping Zhang; Feng Cui; Kai Li) |
| Abstract | We present here a single-neuron spinning control system (SSCS) for a novel non-silicon rotational MEMS gyro with an electrostatically levitated thick-film Ni rotor. The heavier Ni rotor can provide larger moment of inertia and higher spinning stability than its Si counterpart. With the SSCS, the deficiency of the nonlinear spinning dynamic nature of the gyro can be adaptively tackled. In addition, the SSCS is also able to produce continuously stable torque and keep the steady-state spinning speed robustly constant, which is important for performance improvement of the micromachined MEMS gyro. The SSCS is verified by co-simulations using both the Simulink models and the PSpice driving circuit models, which are joined by the SLPS™ software interface. The simulation results show that the SSCS can counteract the step disturbance torque 5e-10 N·m that is one order higher than the steady-state electrostatic driving torque, and almost no speed ripple occurs. |
| Starting Page | 282 |
| Ending Page | 285 |
| File Size | 4716407 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424446292 |
| DOI | 10.1109/NEMS.2009.5068578 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-01-05 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Spinning Control systems Torque Micromechanical devices Steady-state Thickness control Stability Nonlinear dynamical systems Robustness Circuits spinning control Gyro MEMS single neuron |
| Content Type | Text |
| Resource Type | Article |
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