NDLI: The fluid viscosity measurement based on variable cross-section MEMS cantilever under torsional excitation

Content Provider	IEEE Xplore Digital Library
Author	Yingjie Hu Libo Zhao Tongdong Wang Yulong Zhao Guoying Yuan Zhuangde Jiang
Copyright Year	2015
Description	Author affiliation: Collaborative Innovation Center of Suzhou Nano Sci. & Technol., Xi'an Jiaotong Univ., Xi'an, China (Yingjie Hu; Libo Zhao; Tongdong Wang; Yulong Zhao; Guoying Yuan; Zhuangde Jiang)
Abstract	A Micro-electromechanical systems (MEMS) sensor with the variable cross-section micro-cantilever was designed to measure the fluid viscosity. Due to the quality factor of micro-cantilever under the torsional resonance is much higher than that under the first order flexural resonance, the fluid viscosity measuring accuracy under the torsional resonance is much higher. Then an exciting method named the torsional excitation was presented when the direction of magnetic induction lines was parallel with the width direction of the micro-cantilever. Thus, the micro-cantilever could be driven to vibrate directly under the torsional mode by the Lorentz force. The measuring experiments of the fluid viscosity were completed in seven kinds of alkanes under different resonance modes, the results showed that the accuracy and stability of the fluid viscosity measurement can be improved effectively under the torsional resonance mode.
Sponsorship	IEEE
Starting Page	1
Ending Page	4
File Size	1159514
Page Count	4
File Format	PDF
e-ISBN	9781479982035
DOI	10.1109/ICSENS.2015.7370249
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-11-01
Publisher Place	South Korea
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Viscosity Sensors Resonant frequency Semiconductor device measurement Vibrations Temperature measurement Torsional resonance MEMS Sensor Micro-cantilever
Content Type	Text
Resource Type	Article

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