NDLI: Highly-symmetric silicon dioxide shallow shell resonators with angstrom-level roughness

Content Provider	IEEE Xplore Digital Library
Author	Hamelin, B. Tavassoli, V. Ayazi, F.
Copyright Year	2015
Description	Author affiliation: Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA (Hamelin, B.; Tavassoli, V.; Ayazi, F.)
Abstract	A highly-symmetric silicon dioxide shallow shell resonator with angstrom-level roughness (Ra=4.3Å) is presented. Curvature discontinuities in shallow shells, at a controlled distance from the base anchor of the shell, provide acoustic decoupling and significantly reduce the anchor contribution to the frequency split in degenerate wineglass modes as well as their damping. The Finite Element Method (FEM) simulations, performed in COMSOL 4.4, show increasing strain energy density at the vicinity of curvature discontinuities, confirming acoustic decoupling. The fabricated resonant shells are symmetric structures with largely asymmetric supports to force the anchoring stem to be the main contributor to the frequency split. Conformal Imaging Vibrometer (CIV) measurement characterization indicate that the fabricated shallow shell resonators have as-born sub-Hz frequency splits (Δf/f~60ppm), without any electrical frequency tuning, for the lowest elliptical mode shapes, while having asymmetric anchoring stems.
Sponsorship	IEEE
Starting Page	1
Ending Page	4
File Size	2261208
Page Count	4
File Format	PDF
e-ISBN	9781479982035
DOI	10.1109/ICSENS.2015.7370486
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-11-01
Publisher Place	South Korea
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Resonant frequency Silicon Gyroscopes Micromechanical devices Fabrication Etching frequency mismatch MEMS gyroscope curvature discontinuity atomically smooth hemispherical shell resonator mode confinement micro-HRG
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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