NDLI: Room temperature deposition of highly sensitive vanadium oxide films for infrared light sensing applications

Content Provider	IEEE Xplore Digital Library
Author	Grayli, S.V. El-Chami, I. Bahreyni, B. Leach, G.
Copyright Year	2015
Description	Author affiliation: Mechatron. Syst. Eng., Simon Fraser Univ. Surrey, Surrey, BC, Canada (Grayli, S.V.; El-Chami, I.; Bahreyni, B.) \|\| Dept. of Chem., Simon Fraser Univ., Burnaby, BC, Canada (Leach, G.)
Abstract	Uncooled infrared micro bolometer detectors have gained increasing attention for military and commercial imaging applications. Due to their light weight, low power, response in the infrared region, and compatibility with readout integrated circuits, traditional thermo-resistive vanadium oxide based micro-bolometers have become popular compared to pyro-electric and photo-detectors. Traditionally, VOx films are fabricated using ion beam or magnetron sputtering 1, 2. We report on using low cost dip coating deposition of an alkoxide sol gel precursor to fabricate uniform single and triple layers of vanadium oxide to a thickness of 150nm. Experimental results demonstrate the highest reported high temperature coefficient of resistance values for these films at -2.5%/°K, making the dip coating method a low cost alternative for the fabrication of IR sensing applications.
Sponsorship	IEEE
Starting Page	1
Ending Page	4
File Size	811265
Page Count	4
File Format	PDF
e-ISBN	9781479982035
DOI	10.1109/ICSENS.2015.7370601
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-11-01
Publisher Place	South Korea
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Films Annealing Vanadium X-ray diffraction Temperature sensors Resistance Temperature measurement Vanadium Oxide Bolometer Photo-detectors Sol-Gel Process Uncooled Infra-Red Sensors
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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