NDLI: A temperature self-calibrating torsional accelerometer with fully differential configuration and integrated reference capacitor

Content Provider	IEEE Xplore Digital Library
Author	Dingbang Xiao Dewei Xia Qingsong Li Yulie Wu Zhihua Chen Xuezhong Wu
Copyright Year	2015
Description	Author affiliation: Lab. of Sci. & Technol. on Integrated Logistics Support, Nat. Univ. of Defense Technol., Changsha, China (Dingbang Xiao; Dewei Xia; Qingsong Li; Yulie Wu; Zhihua Chen; Xuezhong Wu)
Abstract	This paper reports a new silicon MEMS torsional accelerometer with self-calibration against dynamic temperature environment by taking two structure optimizations compared with the conventional torsional accelerometers: a fully differential configuration and an integrated reference capacitor configuration. The fully differential configuration realizes the self-calibration of the acceleration measurement, by making the two pairs of differential structures have the same sensitivity to temperature but opposite sensitivity to acceleration. And the integrated reference capacitor configuration realizes the self-calibration of the signal transform, by transferring the temperature sensitive reference capacitor from ASIC or PCB to the micro structure. Comparing tests show that output drift in the full temperature range of the accelerometer has a great improvement, from 910 mg to 61 mg, which experimentally demonstrates the effectivity of the two configuration optimizations.
Sponsorship	IEEE
Starting Page	1
Ending Page	4
File Size	1734660
Page Count	4
File Format	PDF
e-ISBN	9781479982035
DOI	10.1109/ICSENS.2015.7370428
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-11-01
Publisher Place	South Korea
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	integrated capacitor accelerometer temperature self-calibration fully differential
Content Type	Text
Resource Type	Article

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