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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Mahabub Hossain, M. Wu Bin Seong Ho Kong |
| Copyright Year | 2015 |
| Description | Author affiliation: Sch. of Electron. Eng., Kyungpook Nat. Univ., Daegu, South Korea (Mahabub Hossain, M.; Wu Bin; Seong Ho Kong) |
| Abstract | An electromagnetically controlled varifocal convex micromirror has been fabricated using MEMS technology. The mirror has a 5 mm × 5 mm square aperture and the planer thin reflecting metal-coated mirror surface curvature is maintained electromagnetically by means of using repulsive force of two magnets. The mirror membrane has a maximum of 18.98 micrometer displacement that ensures significantly larger back-focal length variation from 493.8 cm to 8.2 cm, using a maximum controlling current of 700 mA. This micromirror can be used in reflective optical applications where larger back-focal variation is mostly demanded. |
| Sponsorship | IEEE |
| Starting Page | 1 |
| Ending Page | 4 |
| File Size | 1151384 |
| Page Count | 4 |
| File Format | |
| e-ISBN | 9781479982035 |
| DOI | 10.1109/ICSENS.2015.7370267 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2015-11-01 |
| Publisher Place | South Korea |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Micromirrors Optical surface waves Optical interferometry Silicon Micromechanical devices Optical films adaptive optics convex micromirror deformable mirror electromagnetic actuation focal length variation |
| Content Type | Text |
| Resource Type | Article |
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