NDLI: Virtual probe: A statistically optimal framework for minimum-cost silicon characterization of nanoscale integrated circuits

Content Provider	IEEE Xplore Digital Library
Author	Xin Li Rutenbar, R.R. Blanton, R.D.
Copyright Year	2009
Description	Author affiliation: ECE Department, Carnegie Mellon University, 5000 Forbs Avenue, Pittsburgh, PA 15213 (Xin Li; Rutenbar, R.R.; Blanton, R.D.)
Abstract	In this paper, we propose a new technique, referred to as virtual probe (VP), to efficiently measure, characterize and monitor both inter-die and spatially-correlated intra-die variations in nanoscale manufacturing process. VP exploits recent breakthroughs in compressed sensing [15]-[17] to accurately predict spatial variations from an exceptionally small set of measurement data, thereby reducing the cost of silicon characterization. By exploring the underlying sparse structure in (spatial) frequency domain, VP achieves substantially lower sampling frequency than the well-known (spatial) Nyquist rate. In addition, VP is formulated as a linear programming problem and, therefore, can be solved both robustly and efficiently. Our industrial measurement data demonstrate that by testing the delay of just 50 chips on a wafer, VP accurately predicts the delay of the other 219 chips on the same wafer. In this example, VP reduces the estimation error by up to 10× compared to other traditional methods. Categories and Subject Descriptors B.7.2 [Integrated Circuits]: Design Aids — Verification General Terms Algorithms
Starting Page	433
Ending Page	440
File Size	440288
Page Count	8
File Format	PDF
ISBN	9781605588001
ISSN	10923152
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-11-02
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Association for Computing Machinery, Inc. (ACM)
Subject Keyword	Probes Silicon Integrated circuit measurements Delay Manufacturing processes Compressed sensing Costs Frequency domain analysis Sampling methods Linear programming Integrated Circuit Process Variation Characterization
Content Type	Text
Resource Type	Article
Subject	Computer Graphics and Computer-Aided Design Computer Science Applications Software

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