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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | De Winter, G. Mahieu, S. De Roeck, I. De Gryse, R. Denul, J. |
| Copyright Year | 2002 |
| Abstract | Developing a fast and flexible deposition process for biaxially aligned buffer layers on polycrystalline or amorphous substrates is still an important step toward the development of a scalable process for REBa/sub 2/Cu/sub 3/O/sub 7-x/ (REBCO, RE(RareEarth) = Y, Nd,...) coated conductor. Biaxially aligned Yttria Stabilized Zirconia (YSZ) and Indium Tin Oxide (ITO) thin films were deposited using a specifically modified sputter magnetron. ITO could be an interesting alternative for YSZ as a buffer layer for REBCO, since it is an oxide materials with good electrical conductivity, the lattice matches with REBCO and it has more or less the same thermal expansion coefficient as REBCO. Conducting buffer layers are interesting for some applications. Some publications indicate that there is very little interaction between ITO and YBCO thin films. The layers were deposited in reactive DC sputter mode on glass and nonpolished Hastelloy substrates, at low pressure, with excellent adhesion and high deposition rate : deposition rates up to 75 nm/min were obtained for YSZ and up to 40 nm/min for ITO. The influence of some sputter parameters (e.g., pressure, target-to-substrate distance, ...) on the degree of biaxial alignment was investigated. |
| Sponsorship | Council on Superconductivity Appl. Superconductivity Conference Inc MIT |
| Starting Page | 2567 |
| Ending Page | 2570 |
| Page Count | 4 |
| File Size | 453452 |
| File Format | |
| ISSN | 10518223 |
| Volume Number | 13 |
| Issue Number | 2 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2003-06-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Sputtering Indium tin oxide Buffer layers Amorphous magnetic materials Conducting materials Thermal conductivity Amorphous materials Neodymium Magnetic materials Lattices |
| Content Type | Text |
| Resource Type | Article |
| Subject | Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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