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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Hijazi, Y.S. Hanna, D. Fairweather, D. Vlasov, Y.A. Larkins Jr., G.L. |
| Copyright Year | 2002 |
| Abstract | We have developed a fabrication process for a superconducting MicroElectroMechanical (MEM) shunt switch. The design of the switch has been optimized using Sonnet simulations. The switch consists of a YBa/sub 2/Cu/sub 3/O/sub 7/ Coplanar Waveguide (CPW) transmission line with a gold membrane bridge anchored at the ground planes and suspended above an area of the center conductor covered with BaTiO/sub 3/. Under an applied electric field this membrane bridge actuates downwards and shunts the RF signal to ground. The membrane returns to its original shape when the electric field is removed. In the up position the device exhibits an s/sub 21/ insertion loss of less than 0.25 dB from dc through 900 MHz (most of which is due to radiated loss). In the down position the s/sub 21/ loss in the same frequency range is greater than 30 dB. |
| Sponsorship | Council on Superconductivity Appl. Superconductivity Conference Inc MIT |
| Starting Page | 700 |
| Ending Page | 703 |
| Page Count | 4 |
| File Size | 647689 |
| File Format | |
| ISSN | 10518223 |
| Volume Number | 13 |
| Issue Number | 2 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2003-06-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Switches Fabrication Radio frequency Superconducting transmission lines Biomembranes Coplanar waveguides Bridges Design optimization Planar waveguides Coplanar transmission lines |
| Content Type | Text |
| Resource Type | Article |
| Subject | Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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