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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Ming-Jye Wang Hong-Wen Cheng Sing-Lin Wu Pi-Kuang Chuan Chi, C.C. |
| Copyright Year | 2002 |
| Abstract | The Nb-based superconductor-insulator-superconductor (SIS) tunnel junctions have been broadly used in many applications. The critical current density (J/sub C/), one of the most important parameters of SIS tunnel junction, is usually controlled by the oxygen exposure (E/sub O2/) of the Al oxidation process. R. E. Miller et al. demonstrated the relation between J/sub C/ and oxygen exposure using the SNEP process. However, the value of J/sub C/ still varies with Nb/AlO/sub x/Al/Nb deposition system, even run-to-run process. A new AuAl/sub 2//Al composite, instead of pure Al, has been used in the oxidation process. From the J/sub C/-E/sub O2/ relation, we have demonstrated the oxidation rate of AuAl/sub 2/ is about 400 times lower than that of Al. Using AuAl/sub 2/ layer, two advantages are observed. 1) For low J/sub C/ tunnel junctions, the thickness of AlO/sub X/, or J/sub C/, can be controlled easily by inserting AuAl/sub 2/ layer as a blocking layer in oxidation process. 2) High quality factor tunnel junctions with J/sub C/>100 kA/cm/sup 2/ are achieved by oxidation of AuAl/sub 2/ layer directly. |
| Sponsorship | Council on Superconductivity Appl. Superconductivity Conference Inc MIT |
| Starting Page | 1100 |
| Ending Page | 1103 |
| Page Count | 4 |
| File Size | 664813 |
| File Format | |
| ISSN | 10518223 |
| Volume Number | 13 |
| Issue Number | 2 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2003-06-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Thickness control Oxidation Niobium Fabrication Critical current density Degradation Q factor Physics Gold Josephson junctions |
| Content Type | Text |
| Resource Type | Article |
| Subject | Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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