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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Ikeuchi, S. Yoneda, T. Matsuki, Y. Endo, N. Takeshima, Y. Horiuchi, H. Kishimoto, Y. Yamamoto, K. Fujimoto, K. |
| Copyright Year | 2014 |
| Description | Author affiliation: Murata Manuf. Co., Ltd., Kyoto, Japan (Ikeuchi, S.; Yoneda, T.; Matsuki, Y.; Endo, N.; Takeshima, Y.; Horiuchi, H.; Kishimoto, Y.; Yamamoto, K.; Fujimoto, K.) |
| Abstract | Lead-free piezoelectric (K, $Na)NbO_{3}-CaTiO_{3}$ (KNN-CT) films were prepared on $Pt/Ti/SiO_{2}/Si$ substrates by RF magnetron sputtering. Co-sputtering using a number of KNN-CT targets which vary in compositions of Na/(K+Na) ratio and amount of $CaTiO_{3}$ provided variations in compositions of KNN-CT films. The obtained KNN-CT films had compositions corresponding to the average compositions of the used targets represented by chemical formula of $(1-n)(K_{1-x},$ $Na_{x})NbO_{3}-nCaTiO_{3}$ (x=0.460-0.617, n=0.000-0.065) and the compositional dependencies of their piezoelectric properties were studied. Most KNN-CT films with n>0.000 exhibited relatively high transverse piezoelectric coefficients $|e_{31}$ $*|=|d_{31}|/s_{11,p}>6.0C/m^{2}$ (where $s_{11,p}$ is elastic compliance of the KNN-CT films), whereas n=0.000 $|e_{31}$ $*|<;5.0C/m^{2}.$ In XRD analysis, (002) peak angle of these pseudocubic perovskite films increased with increase of n. From these results, we conclude that $CaTiO_{3}$ was successfully substituted as part of KNN and piezoelectric constant increased by effect of $CaTiO_{3}.$ In addition, the KNN-CT films with x=0.587-0.617 and n=0.027-0.053 exhibited higher $|e_{31}$ *| than any other x and n. Moreover, by 750°C post-annealing process, $|e_{31}$ *| of the KNN-CT film with x=0.587 and n=0.040 was enhanced and the highest $|e_{31}$ $*|=11.7C/m^{2}$ was confirmed. This result of our experiment shows one of highest piezoelectric coefficient for lead free piezoelectric films. |
| Starting Page | 1578 |
| Ending Page | 1581 |
| File Size | 969297 |
| Page Count | 4 |
| File Format | |
| e-ISBN | 9781479970490 |
| DOI | 10.1109/ULTSYM.2014.0391 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2014-09-03 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Films Ceramics Lead Substrates Sputtering Electrodes Niobium sputtering lead free piezoelectric film |
| Content Type | Text |
| Resource Type | Article |
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